@article{CTT100641182,
  author = {Akihiro Matsutani and Hideo Ohtsuki and Ken Ohashi and Tomonori Yokoyama and Hirokazu Yamakage and FUMIO KOYAMA},
  title = {Vertical and Smooth Microfabrication of InP Using Simple High-Density Plasma System with SmCo Ring Magnet},
  journal = {Jpn. J. Appl. Phys.},
  year = 2004,
}