@article{CTT100709246,
  author = {Tadashi Ishida and Van Nguyen Quet and Shota Mochizuki and Yusuke Kagawa and Toshio Takayama and Toru Omata},
  title = {MEMS whistle-type temperature-compensated displacement sensor using resonant frequency shift},
  journal = {Sensors and Actuators A: Physical},
  year = 2015,
}