@inproceedings{CTT100716193,
  author = {Satoru Kaneko and Takashi Matsunaga and Kaoru Ikenaga and Takeshi Ito and Manabu Yasui and Takahiro Horiuchi and Shigeo Yasuhara and Katsuhiro Mihirogi and Masao Kumagai and Eiji Shimodaira and Masazumi Kobayashi and Rieko Sudo and Akifumi Matsuda and MAMORU YOSHIMOTO and Hirofumi Takikawa},
  title = {Diamond Like Carbon Prepared on Silicon Substrate with Ti Buffer Layer},
  booktitle = {The 75th JSAP Autumn Meeting, 2014 Extended Abstracts},
  year = 2014,
}