@article{CTT100788047,
  author = {Tetsuya Miyazawa and Yu Kano and Yasuo Nakayama and KENICHI OZAWA and Toshiharu Iga and Misao Yamanaka and Ayako Hashimoto and Takashi Kikuchi and Kazuhiko Mase},
  title = {Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of outgassing by baking under oxygen},
  journal = {Journal of Vacuum Science & Technology A},
  year = 2019,
}