@article{CTT100822615, author = {Takeshi Takeuchi and Takeshi Katayama and Masahiro Okamura and Katsuki Yano and Akira Sakumi and Toshiyuki Hattori and Noriyosu Hayashizaki and Robert A. Jameson}, title = {A direct plasma injection system into an RFQ for clean and safe ion implantation}, journal = {Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms}, year = 2002, }