@article{CTT100911432, author = {Tomohide Morikawa and Masanori Kodera and Takao Shimizu and Keisuke Ishihama and Yoshitaka Ehara and Osami Sakata and Hiroshi Funakubo}, title = {Domain structure of PbTiO3 and Pb(Zr, Ti)O3 thin films controlled by tensile strain induced from Sr(Zr,Ti)O3 buffer layer}, journal = {Appl. Phys. Lett.}, year = 2024, } @article{CTT100911431, author = {Keisuke Ishihama and Kazuki Okamoto and Akinori Tateyama and Takao Shimizu and Wakiko Yamaoka and Risako Tsurumaru and Shintaro Yoshimura and Yusuke Sato and Hiroshi Funakubo}, title = {Achieving High Piezoelectric Performance in Tetragonal (Bi,Na)TiO3-BaTiO3 Films Across a Wide Composition Range for MEMS Applications}, journal = {ACS Appl. Mater. Interfaces 2024}, year = 2023, } @article{CTT100911395, author = {Shinnosuke Yasuoka and Ryoichi Mizutani and Reika Ota and Takahisa Shiraishi and Takao Shimizu and Kazuki Okamoto and Masato Uehara and Hiroshi Yamada and Morito Akiyama and Hiroshi Funakubo}, title = {Invariant polarization switching kinetics in an (Al0.2Sc0.8)N film with frequency and temperature}, journal = {Appl. Phys. Lett.}, year = 2023, } @article{CTT100911393, author = {José P. B. Silva and Ruben Alcala and Uygar E. Avci and Nick Barrett and Laura Bégon-Lours and Mattias Borg and Seungyong Byun and Sou-Chi Chang and Sang-Wook Cheong and Duk-Hyun Choe and Jean Coignus and Veeresh Deshpande and Athanasios Dimoulas and Catherine Dubourdieu and Ignasi Fina and Hiroshi Funakubo and Laurent Grenouillet and Alexei Gruverman and Jinseong Heo and Michael Hoffmann and H. Alex Hsain and Fei-Ting Huang and Cheol Seong Hwang and Jorge Íñiguez and Jacob L. Jones and Ilya V. Karpov and Alfred Kersch and Taegyu Kwon and Suzanne Lancaster and Maximilian Lederer and Younghwan Lee and Patrick D. Lomenzo and Lane W. Martin and Simon Martin and Shinji Migita and Thomas Mikolajick and Beatriz Noheda and Min Hyuk Park and Karin M. Rabe and Sayeef Salahuddin and Florencio Sánchez and Konrad Seidel and Takao Shimizu and Takahisa Shiraishi and Stefan Slesazeck and Akira Toriumi and Hiroshi Uchida and Bertrand Vilquin and Xianghan Xu and Kun Hee Ye and Uwe Schroeder}, title = {Roadmap on Ferroelectric Hafnia and Zirconia-based materials and devices}, journal = {APL Mater.}, year = 2023, } @article{CTT100911363, author = {Kodai Aoyama and Takao Shimizu and Hideto Kuramochi and Masami Mesuda and Ryo Akiike and Keisuke Ide and Takayoshi Katase and Toshio Kamiya and Yoshisato Kimura and Hiroshi Funakubo}, title = {Enhancement of thermoelectric properties of SrSi2 films by mixing cubic and trigonal phase}, journal = {ACS Appl. Energy Mater. 2023}, year = 2023, } @article{CTT100907522, author = {Kodai Aoyama and Takao Shimizu and Hideto Kuramochi and Masami Mesuda and Ryo Akiike and Takayoshi Katase and Yoshisato Kimura and Hiroshi Funakubo}, title = {Enhanced Thermoelectric Properties of SrSi2 Composite Films with Cubic and Layered Polymorphs}, journal = {ACS Appl. Energy Mater.}, year = 2023, } @article{CTT100890872, author = {Takanori Mimura and Yuki Tashiro and Takao Shimizu and Hiroshi Funakubo}, title = {Systematic Investigation of Ferroelectric Properties in x%YO1.5-(100-x%)Hf1-yZryO2 Films}, journal = {ACS Appl. Electron. Mater.}, year = 2023, } @article{CTT100890873, author = {Akinori Tateyama and Yuichiro Orino and Yoshiharu Ito and Takahisa Shiraishi and Takao Shimizu and Minoru Kurosawa and Hiroshi Funakubo}, title = {Simultaneous high frequency measurement of both direct and inverse transverse piezoelectric coefficients of thin films using longitudinal vibration}, journal = {Sensors and Actuators A: Physical}, year = 2023, } @article{CTT100887355, author = {Yoshitaka Ehara and Takaaki Nakashima and Daichi Ichinose and Shimizu Takao and Takahisa Shiraishi and OSAMI SAKATA and Tomoaki Yamada and Shintaro Yasui and ken nishida and HIROSHI FUNAKUBO}, title = {Film thickness dependence of in-plane ferroelastic domain structure in constrained tetragonal PbTiO3 films induced by isotropic tensile strain}, journal = {Appl. Phys. Lett.}, year = 2022, } @article{CTT100890868, author = {Shinnosuke Yasuoka and Ryoichi Mizutani and Reika Ota and Takahisa Shiraishi and Takao Shimizu and Masato Uehara and Hiroshi Yamada and Morito Akiyama and Hiroshi Funakubo}, title = {Tunable Ferroelectric Properties in Wurtzite (Al0.8Sc0.2)N via Crystal Anisotropy}, journal = {ACS Appl. Electron. Mater.}, year = 2022, } @article{CTT100890830, author = {Masanori Kodera and Keisuke Ishihama and Takao Shimizu and Hiroshi Funakubo}, title = {Preferential growth of (001)-oriented Bi2SiO5 thin films deposited on (101)-oriented rutile substrates and their ferroelectric and dielectric properties}, journal = {Scientific Reports}, year = 2022, } @article{CTT100890758, author = {Takanori Mimura and Takao Shimizu and Hiroshi Funakubo}, title = {Preparation of orthorhombic Y-doped TaON film}, journal = {J Ceram Soc. Jpn.}, year = 2022, } @article{CTT100889889, author = {Shinnosuke YASUOKA and Ryoichi MIZUTANI and Reika OTA and Takahisa SHIRAISHI and Takao SHIMIZU and Shintaro YASUI and Yoshitaka EHARA and Ken NISHIDA and Masato UEHARA and Hiroshi YAMADA and Morito AKIYAMA and Yasuhiko IMAI and Osami SAKATA and Hiroshi FUNAKUBO}, title = {Enhancement of crystal anisotropy and ferroelectricity by decreasing thickness in (Al,Sc)N films}, journal = {J. Ceram. Soc. Jpn.}, year = 2022, } @article{CTT100890804, author = {Yoshiomi Hiranaga and Takanori Mimura and Takao Shimizu and Hiroshi Funakubo and Yasuo Cho}, title = {Nanoscale Mapping Concerning Asymmetry of Local C-V Curves in Ferroelectric Materials}, journal = {Jpn. J. Appl. Phy.}, year = 2022, } @article{CTT100890774, author = {Masato Uehara and Ryoichi Mizutani and Shinnosuke Yasuoka and Takao Shimizu and Hiroshi Yamada and Morito Akiyama and Hiroshi Funakubo}, title = {Lower ferroelectric coercive field of ScGaN with equivalent remanent polarization as ScAlN}, journal = {Appl. Phys. Exp.}, year = 2022, } @article{CTT100874621, author = {Tomoya Sato and Masanori Kodera and Daichi Ichinose and Takanori Mimura and Takao Shimizu and Tomoaki Yamada and Hiroshi Funakubo}, title = {Domain structures induced by tensile thermal strain in epitaxial PbTiO3 films on silicon substrates}, journal = {J. Appl. Phys.}, year = 2022, } @article{CTT100874607, author = {Yoshiharu Ito and Akinori Tateyama and Rurika Kubota and Takahisa Shiraish and Takao Shimizu and Osami Sakata and Jaemyung Kim and Minoru Kurosawa and Hiroshi Funakubo}, title = {Polar-axis oriented epitaxial tetragonal (Bi,K)TiO3 films deposited below Curie temperature by hydrothermal method}, journal = {Appl. Phys. Lett.}, year = 2022, } @article{CTT100874609, author = {Reijiro Shimura and Takanori Mimura and Akinori Tateyama and Takahisa Shiraishi and Takao Shimizu and Tomoaki Yamada and Yoshitomo Tanaka and Yukari Inoue and Hiroshi Funakubo}, title = {No-Heating Deposition of 1-μm-Thick Y-Doped HfO2 Ferroelectric Films with Good Ferroelectric and Piezoelectric Properties by Radio Frequency Magnetron Sputtering Method}, journal = {Phys. Status Solidi RRL}, year = 2022, } @article{CTT100864918, author = {Takao Shimizu and Miyu Hasegawa and Keisuke Ishihama and Akinori Tateyama and Wakiko Yamaoka and Risako Tsurumaru and Shintaro Yoshimura and Yusuke SATO and Hiroshi Funakubo}, title = {Piezoelectric responses beyond Pb(Zr,TiO)3 in Pb-free perovskite thin films by ferroelastic domain switching: Free from Pb and MPB}, journal = {ACS Appl. Mater. Interfaces 2021}, year = 2021, } @article{CTT100864854, author = {Masato Uehara and Ryoichi Mizutani and Shinnosuke Yasuoka and Takahisa Shiraishi and Takao Shimizu and Hiroshi Yamada and Morito Akiyama and Hiroshi Funakubo}, title = {Demonstration of ferroelectricity in GaN-based thin film}, journal = {Appl. Phys. Lett.}, year = 2021, } @article{CTT100864853, author = {Keisuke Ishihama and Takao Shimizu and Wakiko Yamaoka and Risako Tsurumaru and Shintaro Yoshimura and Yusuke Sato and Hiroshi Funakubo}, title = {Composition dependencies of crystal structure and electrical properties of epitaxial tetragonal (Bi, Na)TiO3-BaTiO3 films grown on (100)cSrRuO3//(100)SrTiO3 substrates by pulsed laser depositions}, journal = {J. Appl. Phys.}, year = 2021, } @article{CTT100864727, author = {Shinnosuke Yasuoka and Takao Shimizu and Masato Uehara and Hiroshi Yamada and Morito Akiyama and Hiroshi Funakubo}, title = {Impact of deposition temperature on crystal structure and ferroelectric properties of (Al1-xScx)N films prepared by sputtering method}, journal = {Phys. Status Solidi A 2021}, year = 2021, } @article{CTT100864826, author = {Ryoichi Mizutani and Shinnosuke Yasuoka and Takahisa Shiraishi and Takao Shimizu and Masato Uehara and Hiroshi Yamada and Morito Akiyama and Osami Sakata and Hiroshi Funakubo}, title = {Thickness scaling of (Al0.8Sc0.2)N films with remanent polarization beyond 100 μC/cm2 around 10 nm in thickness}, journal = {Appl. Phys. Exp.}, year = 2021, } @article{CTT100864744, author = {Hiranaga Yoshiomi and Mimura Takanori and Shimizu Takao and Funakubo Hiroshi and Cho Yasuo}, title = {High-precision Local C-V Mapping for Ferroelectrics Using Principal Component Analysis}, journal = {Jpn. J. Appl. Phys.}, year = 2021, } @article{CTT100864743, author = {Yoshitaka Ehara and Daichi Ichinose and Masanori Kodera and Takahisa Shiraishi and Takao Shimizu and Tomoaki Yamada and Ken Nishida and Hiroshi Funakubo}, title = {Influence of cooling rate on ferroelastic domain structure for epitaxial (100)/(001)-oriented Pb(Zr, Ti)O3 thin films under tensile strain}, journal = {Jpn. J. Appl. Phys.}, year = 2021, } @article{CTT100864160, author = {Keisuke Ishihama and Masanori Kodera and Takao Shimizu and Wakiko Yamaoka and Risako Tsurumaru and Shintaro Yoshimura and Yusuke Sato and Hiroshi Funakubo}, title = {Growth of 0.1(Bi, Na)TiO3-0.9BaTiO3 epitaxial films by pulsed laser deposition and their electric properties}, journal = {J.Ceram. Soc. Jpn.}, year = 2021, } @article{CTT100863342, author = {Yuki Tashiro and Takao Shimizu and Takanori Mimura and Hiroshi Funakubo}, title = {Comprehensive study on the kinetic formation of the orthorhombic ferroelectric phase in epitaxial Y-doped ferroelectric HfO2 thin films}, journal = {ACS Applied Electronic Materials 2021}, year = 2021, } @article{CTT100863341, author = {Yuki Tashiro and Takao Shimizu and Takanori Mimura and Hiroshi Funakubo}, title = {Comprehensive study on the kinetic formation of the orthorhombic ferroelectric phase in epitaxial Y-doped ferroelectric HfO2 thin films}, journal = {ACS Applied Electronic Materials 2021}, year = 2021, } @article{CTT100852331, author = {Reijiro Shimura and Takanori Mimura and Akinori Tateyama and Takao Shimizu and Tomoaki Yamada and Hiroshi Funakubo}, title = {Preparation of 1 μm-thick Y-doped HfO2 ferroelectric films on (111)Pt/TiOx/SiO2/(001)Si substrates by a sputtering method and their ferroelectric and piezoelectric properties}, journal = {Jpn. J. Appl. Phys.}, year = 2021, } @article{CTT100852792, author = {Takanori Mimura and Takao Shimizu and Osami Sakata and Hiroshi Funakubo}, title = {Large Thermal hysteresis of ferroelectric transition in HfO2-based ferroelectric films}, journal = {Appl. Phys. Let.}, year = 2021, } @article{CTT100852833, author = {Takao Shimizu and Yuki Tashiro and Takanori Mimura and Takanori Kiguchi and Takahisa Shiraishi and Toyohiko J. Konnno and Osami Sakata and Hiroshi Funakubo}, title = {Electric-field-induced ferroelectricity in 5%Y-doped Hf0.5Zr0.5O2: Transformation from the paraelectric tetragonal phase to the ferroelectric orthorhombic phase}, journal = {Physica Status Solidi}, year = 2021, } @article{CTT100852329, author = {Daichi Ichinose and Takao Shimizu and Osami Sakata and Tomoaki Yamada and Yoshitaka Ehara and Hirosh Funakubo}, title = {Domain structure transition in compressive strained (100)/(001) epitaxial tetragonal PZT film}, journal = {J. Appl. Phys.}, year = 2021, } @article{CTT100849036, author = {Yoshiomi Hiranaga and Takanori Mimura and Takao Shimizu and Hiroshi Funakubo and Yasuo Cho}, title = {Local C-V mapping for ferroelectrics using scanning nonlinear dielectric microscopy}, journal = {J. Appl. Phys.}, year = 2020, } @article{CTT100849033, author = {Atsuo Katagiri and Mutsuo Uehara and Mao Kurokawa and Kensuke Akiyama and Takao Shimizu and Masaaki Matsushima and Hiroshi Uchida and Yoshisato Kimura and Hiroshi Funakubo}, title = {Composition Dependence of Crystal Structures and Electrical Properties of Ca-Mg-Si Films Prepared by Sputtering}, journal = {Journal of ELECTRONIC MATERIALS}, year = 2020, } @article{CTT100849034, author = {Masanori Kodera and Takao Shimizu and Hiroshi Funakubo}, title = {Epitaxial Crystal Growth of Bismuth Silicate Driven by Fluorite-Like Layers}, journal = {Cryst. Growth Des.}, year = 2020, } @article{CTT100849032, author = {Akinori Tateyama and Yoshiharu Ito and Yoshiko Nakamura and Takao Shimizu and Yuichiro Orino and Minoru Kurosawa and Hiroshi Uchida and Takahisa Shiraishi and Takanori Kiguchi and Toyohiko J. Konno and Takeshi Yoshimura and Hiroshi Funakubo}, title = {Good piezoelectricity of self-polarized thick epitaxial (K,Na)NbO3 films grown below the Curie temperature (240°C) using a hydrothermal method}, journal = {Appl. Phys. Lett.}, year = 2020, } @article{CTT100849031, author = {Shinnosuke Yasuoka and Takao Shimizu and Masato Uehara and Hiroshi Yamada and Morito Akiyama and Yoshiomi Hiranaga and Yasuo Cho and Hiroshi Funakubo}, title = {Effects of deposition conditions on the ferroelectric properties of (Al1-xScx)N thin films}, journal = {J. Appl. Phys.}, year = 2020, } @article{CTT100849010, author = {Hiroki Tanaka and Kiyoshi Uchiyama and Takao Shimizu and Hiroshi Funakubo}, title = {Optimization of deposition conditions of Y doped-SrZrO3 thin films fabricated by pulsed laser deposition}, journal = {J. Ceram. Soc. Jpn.}, year = 2020, } @article{CTT100849011, author = {Akinori Tateyama and Yoshiharu Ito and Takao Shimizu and Yuichiro Orino and Minoru Kurosawa and Takeshi Yoshimura and Hiroshi Funakubo}, title = {Composition dependency of direct and inverse transverse piezoelectric property in self-polarized epitaxial (KxNa1-x)NbO3 films grown by hydrothermal method}, journal = {Jpn. J. Appl. Phys.}, year = 2020, } @article{CTT100849009, author = {Yoshiharu Ito and Akinori Tateyama and Yoshiko Nakamura and Takao Shimizu and Minoru Kurosawa and Hiroshi Uchida and Takahisa Shiraishi and Takanori Kiguchi and Toyohiko J. Konno and Mutsuo Ishikawa and Nobuhiro Kumada and Hiroshi Funakubo}, title = {High yield preparation of (100)c-oriented (K,Na)NbO3 thick films by hydrothermal method using amorphous niobium source}, journal = {J. Ceram. Soc. Jpn.}, year = 2020, } @article{CTT100849008, author = {Reijiro Shimura and Takanori Mimura and Takao Shimizu and Yoshitomo Tanaka and Yukari Inoue and Hiroshi Funakubo}, title = {Preparation of near-1-μm-thick {100}-oriented epitaxial Y-doped HfO2 ferroelectric films on (100)Si substrates by an RF magnetron sputtering method}, journal = {J.Ceram. Soc. Jpn}, year = 2020, } @article{CTT100849014, author = {Yoshitaka Ehara and Takaaki Nakashima and Daichi Ichinose and Takao Shimizu and Tomoaki Yamada and Ken Nishida and Hiroshi Funakubo}, title = {Temperature dependence on the domain structure of epitaxial PbTiO3 films grown on single-crystal substrates with different lattice parameters}, journal = {Jpn. J. Appl. Phys.}, year = 2020, } @article{CTT100849023, author = {Mitsumasa Nakajima and Takao Shimizu and Hiroshi Nakaki and Tomoaki Yamada and Ayumi Wada and Takaaki Nakashima and Yoshitaka Ehara and Hiroshi Funakubo}, title = {Large electromechanical responses driven by electrically induced dense ferroelastic domains:beyond morphotropic phase boundary}, journal = {ACS Appl. Electron. Mater. 2020}, year = 2020, } @inproceedings{CTT100926720, author = {青山航大 and 清水荘雄 and 倉持豪人 and 召田雅実 and 秋池良 and 片瀬貴義 and 木村好里 and 舟窪浩}, title = {(Ba,Sr,Ca)Si2膜の作製と熱電特性評価}, booktitle = {}, year = 2024, } @inproceedings{CTT100920069, author = {平永良臣 and 三村和仙 and 清水荘雄 and 舟窪浩 and 長康雄}, title = {局所C-Vマップの画像処理に基づくナノスケール強誘電分極反転ダイナミクスの解析}, booktitle = {}, year = 2024, } @inproceedings{CTT100919859, author = {石濱圭佑 and 岡本一輝 and 森川友秀 and 舟窪浩 and 小寺正徳 and 清水荘雄 and 小金澤智之 and 仲谷友孝 and 坂田修身}, title = {強誘電体ドメイン構造制御に向けたペロブスカイト型Sr(Zr,Ti)O3バッファ層の作製}, booktitle = {}, year = 2024, } @inproceedings{CTT100919857, author = {清水荘雄 and 岡本一輝 and 舟窪浩 and 小金澤智之 and 仲谷友孝 and 坂田修身}, title = {面内分極配向BaTiO3基エピタキシャル薄膜の作製}, booktitle = {}, year = 2024, } @inproceedings{CTT100920015, author = {野口雄貴 and 三村和仙 and 清水荘雄 and 舟窪浩 and 平永良臣}, title = {局所C-Vマッピングと圧電応答顕微鏡の統合計測システムの開発}, booktitle = {}, year = 2024, } @inproceedings{CTT100919956, author = {中畑美紀 and 岡本一輝 and 石濱圭佑 and 清水荘雄 and 小金澤智之 and 仲谷友孝 and 坂田修身 and 山田智明 and 舟窪浩}, title = {(100)/(001)配向正方晶Pb(Zr,Ti)O3膜における結晶構造のその場観察}, booktitle = {}, year = 2024, } @inproceedings{CTT100916746, author = {Hiroshi Funakubo and Kazuki Okamoto and Takao Shimizu and Tomoaki Yamada}, title = {Progress of Research on None-Perovskite Dielectric Materials}, booktitle = {}, year = 2024, } @inproceedings{CTT100916745, author = {Hiroshi Funakubo and Takao Shimizu and Takanori Mimura and Kazuki Okamoto}, title = {Ferroelectric and Piezoelectric Properties of Non-perovskite Simple Oxide}, booktitle = {}, year = 2023, } @inproceedings{CTT100916930, author = {村下太一 and 岡本一輝 and 高橋雄真 and 窪田るりか and 伊東良晴 and 藤井康裕 and 是枝聡肇 and 清水荘雄 and 小林俊介 and 加藤丈晴 and 黄馨慧 and 森分博紀 and 幾原雄一 and 舟窪浩}, title = {水熱合成法で作製した(Bi, K)TiO3基強誘電体薄膜の熱処理効果とそれらの局所構造評価}, booktitle = {}, year = 2023, } @inproceedings{CTT100917763, author = {Keisuke Ishihama and Kazuki Okamoto and Masanori Kodera and Tomohide Morikawa and Takao Shimizu and Hiroshi Funakubo}, title = {Exploring the Impact of Sr(Zr,Ti)O3 Buffer Layers for Controlling Domain Structure of Ferroelectric Thin Films}, booktitle = {}, year = 2023, } @inproceedings{CTT100917758, author = {Shinnosuke Yasuoka and Kazuki Okamoto and Takao Shimizu and Hiroshi Funakubo}, title = {Characterization of Ferroelectric Switching Properties for (Al,Sc)N Films with Various Composition}, booktitle = {}, year = 2023, } @inproceedings{CTT100916927, author = {Yoshiki Maekawa and Koji Hirai and Kazuki Okamoto and Takao Shimizu and Hiroshi Funakubo}, title = {Orientation Control of {100}-oriented Epitaxial Y-doped HfO2 Thin Films Using Lattice Matching}, booktitle = {}, year = 2023, } @inproceedings{CTT100914312, author = {Hiroshi Funakubo and Yuma Takahashi and Takahisa Shiraishi and Kodera Masanori and Reijiro Shimura and Takanori Mimura and Keisuke Ishihama and Kazuki Okamoto and Hiroki Moriwake and Ayako Taguchi and Takao Shimizu and Yasuhiro Fujii and Akitoshi Koreeda}, title = {Stabilization and Identification of Ferroelectric HfO2 Thin Films}, booktitle = {}, year = 2023, } @inproceedings{CTT100914310, author = {H. Funakubo and T. Shimizu and T. Mimura and T. Shiraishi and K. Okamoto}, title = {Impact of electric field on crystal structure and properties of HfO2-based ferroelectric films}, booktitle = {}, year = 2023, } @inproceedings{CTT100912061, author = {山田智明 and Yuan Xueyou and 太田悠登 and 清水荘雄 and 岡本一輝 and 吉野正人 and 舟窪浩 and 長崎正雅}, title = {引張歪み(PbxSr1-x)TiO3極薄膜の特異なドメイン構造と相転移}, booktitle = {}, year = 2023, } @inproceedings{CTT100912059, author = {清水荘雄 and 青山航大 and 倉持豪人 and 召田雅実 and 秋池良 and 片瀬貴義 and 木村好里 and 舟窪浩}, title = {二相共存 SrSi2における熱電特性}, booktitle = {}, year = 2023, } @inproceedings{CTT100903681, author = {安岡 慎之介 and 岡本 一輝 and 清水 荘雄 and 松井 尚子 and 入澤 寿和 and 恒川 孝二 and 舟窪 浩}, title = {種々の組成の(Al, Sc)N多層膜のスイッチング特性評価}, booktitle = {}, year = 2023, } @inproceedings{CTT100903684, author = {Xueyou Yuan and Yuto Ota and Daichi Ichinose and Takao Shimizu and Kazuki Okamoto and Yoshitaka Ehara and Masahito Yoshino and Takanori Nagasaki and Hiroshi Funakubo and Tomoaki Yamada}, title = {Domain architecture engineering of tensile-strained (PbxSr1-x)TiO3 thin films}, booktitle = {}, year = 2023, } @inproceedings{CTT100903683, author = {石濱 圭佑 and 岡本 一輝 and 小寺 正徳 and 森川 友秀 and 清水 荘雄 and 舟窪 浩}, title = {強誘電体薄膜のドメイン構造制御に向けたSr(Zr,Ti)O3バッファ層の検討}, booktitle = {}, year = 2023, } @inproceedings{CTT100903686, author = {前川 芳輝 and 平井 浩司 and 岡本 一輝 and 清水 荘雄 and 舟窪 浩}, title = {格子整合によるY 添加HfO2強誘電体薄膜の配向制御}, booktitle = {}, year = 2023, } @inproceedings{CTT100912065, author = {Xueyou Yuan and Yuto Ota and Daichi Ichinose and Takao Shimizu and Kazuki Okamoto and Yoshitaka Ehara and Masahito Yoshino and Takanori Nagasaki and Hiroshi Funakubo and Tomoaki Yamada}, title = {Domain architecture engineering of tensile-strained (PbxSr1-x)TiO3 thin films}, booktitle = {}, year = 2023, } @inproceedings{CTT100914308, author = {Hiroshi Funakubo and Akinori Tateyama and Yuichiro Orino and Yoshiharu Ito and Takahisa Shiraishi and Takao Shimizu and Minoru Kurosawa}, title = {Characterization of Piezoelectric (K, Na)NbO3 Films for MEMS Applications}, booktitle = {}, year = 2023, } @inproceedings{CTT100912039, author = {平永良臣 and 野口雄貴 and 三村和仙 and 清水荘雄 and 舟窪浩 and 長康雄}, title = {局所C-V マッピング法を用いたグレイン境界と強誘電分極反転挙動の関係に関する解析}, booktitle = {}, year = 2023, } @inproceedings{CTT100904761, author = {平永良臣 and 野口雄貴 and 三村和仙 and 清水荘雄 and 舟窪浩 and 長康雄}, title = {局所C-Vマップの機械学習解析に基づくグレイン境界と強誘電ドメイン挙動の相関に関する統計的評価}, booktitle = {}, year = 2023, } @inproceedings{CTT100901296, author = {前川芳輝 and 平井浩司 and 安岡慎之介 and 岡本一輝 and 清水荘雄 and 舟窪浩}, title = {様々な基板上におけるY:HfO2エピタキシャル膜の合成と評価}, booktitle = {}, year = 2023, } @inproceedings{CTT100901301, author = {安岡慎之介 and 大田怜佳 and 岡本一輝 and 清水荘雄 and 舟窪浩}, title = {NbN電極上に作製したエピタキシャル(Al, Sc)N膜の電気特性評価}, booktitle = {}, year = 2023, } @inproceedings{CTT100901294, author = {前川芳輝 and 平井浩司 and 安岡慎之介 and 岡本一輝 and 清水荘雄 and 舟窪浩}, title = {種々の基板上におけるHfO2基エピタキシャル膜の合成と評価}, booktitle = {}, year = 2023, } @inproceedings{CTT100904716, author = {Masato Uehara and Ryoichi Mizutani and Shinnosuke Yasuoka and Takao Shimizu and Hiroshi Yamada and Morito Akiyama and Hiroshi Funakubo}, title = {Demonstration of Ferroelectric Properties in GaN Alloyed with Sc}, booktitle = {}, year = 2022, } @inproceedings{CTT100902545, author = {舟窪浩 and 清水荘雄 and 白石貴久 and 岡本一輝}, title = {ペロブスカイト基強誘電体と比較したHfO2 やAlN 基強誘電体の特徴}, booktitle = {}, year = 2022, } @inproceedings{CTT100902544, author = {Hiroshi Funakubo and Shinnosuke Yasuoka and Ryoichi Mizutani and Takahisa Shiraishi and Akinori Tateyama and Reika Ota and Kazuki Okamoto and Takao Shimizu and Masato Uehara and Hiroshi Yamada and Morito Akiyama}, title = {Thickness Scaling and Low Voltage Operation of Ferroelectric (Al1-xScx)N Films Prepared by Sputtering Method}, booktitle = {}, year = 2022, } @inproceedings{CTT100901716, author = {舟窪浩 and 清水荘雄 and 白石貴久 and 岡本一輝}, title = {ペロブスカイト基強誘電体と比較したHfO2 やAlN 基強誘電体の特徴}, booktitle = {}, year = 2022, } @inproceedings{CTT100903083, author = {T. Shimizu and H. Funakubo and N. Ohashi}, title = {Materials Aspects of New Ferroelectrics with Simple Crystal Structure}, booktitle = {}, year = 2022, } @inproceedings{CTT100902884, author = {清水荘雄 and 江原祥隆 and 坂田修身 and 舟窪浩}, title = {時間分解X線回折によるPZTのドメインスイッチングにおける周期電場の影響の研究}, booktitle = {}, year = 2022, } @inproceedings{CTT100902979, author = {平永良臣 and 三村和仙 and 清水荘雄 and 舟窪浩 and 長康雄}, title = {局所C-Vマッピング法による強誘電体薄膜のナノスケール分極反転ダイナミクスのクラスタ解析}, booktitle = {}, year = 2022, } @inproceedings{CTT100902980, author = {上原雅人 and 水谷涼一 and 安岡慎之介 and 清水荘雄 and 山田浩志 and 秋山守人 and 舟窪浩}, title = {Sc添加GaN薄膜の強誘電性へのSc濃度と温度の影響}, booktitle = {}, year = 2022, } @inproceedings{CTT100901287, author = {安岡慎之介 and 大田怜佳 and 岡本一輝 and 石濱圭佑 and 清水荘雄 and 角嶋邦之 and 上原雅人 and 山田浩志 and 秋山守人 and 小金澤智之 and L. S. R. Kumara and Okkyun Seo and 坂田修身 and 舟窪浩}, title = {メモリ応用に向けた(Al, Sc)N膜の薄膜化の検討}, booktitle = {}, year = 2022, } @inproceedings{CTT100903079, author = {Takao Shimizu and Yuki Tashiro and Takanori Mimura and Hiroshi Funakubo}, title = {Kinetic formation and field induced phase transition in ferroelectric HfO2- based materials}, booktitle = {}, year = 2022, } @inproceedings{CTT100902541, author = {Hiroshi Funakubo and Daichi Ichinose and Yoshitaka Ehara and Takao Shimizu and Osami Sakata and Tomoaki Yamada}, title = {Domain structure change by applying an electric field in dominantly in-plane-polarized (100)/(001)-oriented tetragonal Pb(Zr,Ti)O3 films}, booktitle = {}, year = 2022, } @inproceedings{CTT100902620, author = {清水荘雄 and 舟窪浩 and 大橋直樹}, title = {新規非ペロブスカイト型強誘電体の開発}, booktitle = {}, year = 2022, } @inproceedings{CTT100902622, author = {平永良臣 and 三村和仙 and 清水荘雄 and 舟窪浩 and 長康雄}, title = {局所C-V 曲線の非対称性に関するナノスケールマッピング}, booktitle = {}, year = 2022, } @inproceedings{CTT100902623, author = {Pratyush Buragohain and Sangita Dutta and Haidong Lu and Sebastjan Glinšek and Hugo Aramberri and Claudia Richter and Terrence Mittmann and Pamenas Kariuki and Takanori Mimura and Takao Shimizu and Hiroshi Funakubo and Uwe Schroeder and Emmanuel Defay}, title = {Observation of Negative Piezoelectricity in HfO2-Based Thin Film Capacitors}, booktitle = {}, year = 2022, } @inproceedings{CTT100902547, author = {Pratyush P. Buragohain and Sangita Dutta and Haidong Lu and Sebastjan Glinsek and Hugo Aramberri and Claudia Richter and Pamenas Kariuki and Terence Mittmann and Takanori Mimura and Takao Shimizu and Hiroshi Funakubo and Uwe Schroeder and Emmanuel Defay and Jorge Iniguez and Alexei Gruverman}, title = {Observation of Negative Piezoelectricity in HfO2-Based Thin-Film Capacitors}, booktitle = {}, year = 2022, } @inproceedings{CTT100902548, author = {Pratyush P. Buragohain and Adam Erickson and Takanori Mimura and Takao Shimizu and Hiroshi Funakubo and Alexei Gruverman}, title = {Intrinsic Switching in Ferroelectric Y:HfO2 Thin Film Capacitors}, booktitle = {}, year = 2022, } @inproceedings{CTT100902550, author = {Shinnosuke Yasuoka and Ryoichi Mizutani and Reika Ota and Takahisa Shiraishi and Takao Shimizu and Masato Uehara and Hiroshi Yamada and Morito Akiyama and Hiroshi Funakubo}, title = {Establishment of Control Method for Ferroelectric Properties in (Al1-xScx)N Films}, booktitle = {}, year = 2022, } @inproceedings{CTT100874834, author = {三村和仙 and 清水荘雄 and 坂田修身 and 舟窪浩}, title = {HfO2基強誘電体の相転移における熱履歴}, booktitle = {}, year = 2022, } @inproceedings{CTT100875597, author = {安岡慎之介 and 水谷涼一 and 大田怜佳 and 白石貴久 and 清水荘雄 and 安井伸太郎 and 江原祥隆 and 西田謙 and 上原雅人 and 山田浩志 and 秋山守人 and 今井康彦 and 坂田修身 and 舟窪浩}, title = {薄膜化による(Al,Sc)N膜の結晶異方性及び強誘電特性の向上}, booktitle = {}, year = 2022, } @inproceedings{CTT100875596, author = {安岡慎之介 and 水谷涼一 and 大田怜佳 and 白石貴久 and 清水荘雄 and 上原雅人 and 山田浩志 and 秋山守人 and 舟窪浩}, title = {面内配向及び熱歪による(Al,Sc)N薄膜の強誘電特性の制御}, booktitle = {}, year = 2022, } @inproceedings{CTT100874691, author = {Hiranaga Y. and Mimura T. and Shimizu T. and Funakubo H. and Cho Y.}, title = {Nanoscale Domain Dynamics Characterization Using Local C-V Mapping}, booktitle = {}, year = 2021, } @inproceedings{CTT100874651, author = {Takao Shimizu and Yuki Tashiro and Takanori Mimura and Hiroshi Funakubo}, title = {Ferroelectricity induced by the kinetic formation in Y-HfO2 epitaxial films}, booktitle = {}, year = 2021, } @inproceedings{CTT100874647, author = {安岡慎之介 and 水谷涼一 and 大田怜佳 and 白石貴久 and 清水荘雄 and 上原雅人 and 山田浩志 and 秋山守人 and 舟窪浩}, title = {強誘電体(Al1-xScx)N薄膜の結晶構造と電気特性の関係}, booktitle = {}, year = 2021, } @inproceedings{CTT100865364, author = {Hiroshi Funakubo and Shinnosuke Yasuoka and Ryoichi Mizutani and Takahisa Shiraishi and Akinori Tateyama and Takao Shimizu and Masato Uehara and Hiroshi Yamada and Morito Akiyama and Yoshiomi Hiranaga and Yasuo Cho}, title = {Control of Ferroelectric Property in (Al1-xScx)N Films Prepared by Sputtering Method}, booktitle = {}, year = 2021, } @inproceedings{CTT100865371, author = {FUNAKUBO Hiroshi and SHIMIZU Takao and SHIRAISHI Takahisa}, title = {Development of non-perovskite ferroelectric thin films}, booktitle = {}, year = 2021, } @inproceedings{CTT100865369, author = {Funakubo, H. and Shimura, R. and Mimura, T. and Tateyama, A. and Nakamura, Y. and Shimizu, T. and Yamada, T. and Tanaka, Y. and Inoue, Y.}, title = {Low temperature preparation of thick Y-HfO2 ferroelectric films}, booktitle = {}, year = 2021, } @inproceedings{CTT100867233, author = {平永良臣 and 三村和仙 and 清水荘雄 and 舟窪浩 and 長康雄}, title = {局所C-Vマッピングにおける主成分分析によるノイズ除去}, booktitle = {}, year = 2021, } @inproceedings{CTT100867238, author = {石濱圭佑 and 清水荘雄 and 佐藤祐介 and 山岡和希子 and 鶴丸理沙子 and 吉村真太郎 and 舟窪浩}, title = {正方晶(1-x)(Bi,Na)TiO3- xBaTiO3エピタキシャル膜の結晶構造及び電気的特性の組成依存性}, booktitle = {}, year = 2021, } @inproceedings{CTT100867241, author = {Shimizu, T. and Tashiro Y. and Takanori M. and Shiraishi T. and Kiguchi T. and Konno T. J. and Sakata O. and Funakubo H.}, title = {Field-Induced Structural Change in HfO2-Based Ferroelectric Materials}, booktitle = {}, year = 2021, } @inproceedings{CTT100867226, author = {清水荘雄 and 田代裕貴 and 三村和仙 and 舟窪浩}, title = {Y-置換HfO2基材料の強誘電性の発現}, booktitle = {}, year = 2021, } @inproceedings{CTT100865373, author = {舟窪浩 and 白石貴久 and 清水荘雄}, title = {変位型強誘電体の最前線}, booktitle = {}, year = 2021, } @inproceedings{CTT100865372, author = {舟窪浩 and 白石貴久 and 清水荘雄}, title = {圧電体および強誘電体薄膜における脱ペロブスカイト構造}, booktitle = {}, year = 2021, } @inproceedings{CTT100865040, author = {Hiroshi Funakubo and Yuki Tashiro and Takanori Mimura and Takao Shimizu}, title = {Phase stability of ferroelectric HfO2-based films}, booktitle = {}, year = 2021, } @inproceedings{CTT100865677, author = {Keisuke Ishihama and Takao Shimizu and Wakiko Yamaoka and Risako Tsurumaru and Shintaro Yoshimura and Yusuke Sato and Hiroshi Funakubo}, title = {Composition dependencies of crystal structure and electrical properties of epitaxial tetragonal (Bi,Na)TiO3-BaTiO3 films}, booktitle = {}, year = 2021, } @inproceedings{CTT100865676, author = {舘山明紀 and 伊東良晴 and 白石貴久 and 清水荘雄 and 黒澤実 and 折野裕一郎 and 山田智明 and 舟窪浩}, title = {水熱合成法で合成した (K, Na)NbO3膜における圧電特性の周波数依存性}, booktitle = {}, year = 2021, } @inproceedings{CTT100865675, author = {石濱圭佑 and 舘山明紀 and 清水荘雄 and 佐藤祐介 and 山岡和希子 and 鶴丸理沙子 and 舟窪浩}, title = {正方晶 (1-x)(Bi, Na)TiO3-xBaTiO3膜における圧電特性の組成依存性}, booktitle = {}, year = 2021, } @inproceedings{CTT100865673, author = {平永良臣 and 三村和仙 and 清水荘雄 and 舟窪浩 and 長康雄}, title = {局所C-V曲線で観るナノスケール強誘電分極反転挙動}, booktitle = {}, year = 2021, } @inproceedings{CTT100865672, author = {江原祥隆 and 一ノ瀬大地 and 小寺正徳 and 森川友秀 and 白石貴久 and 清水荘雄 and 山田智明 and 舟窪浩 and 西田謙}, title = {面内引張り歪みを持つ正方晶 Pb(Zr, Ti)O3エピタキシャル薄膜の冷却条件によるドメイン構造への影響}, booktitle = {}, year = 2021, } @inproceedings{CTT100865671, author = {Xueyou Yuan and Yuto Ota and Masahito Yoshino and Takanori Nagasaki and Yoshitaka Ehara and Takao Shimizu and Hiroshi Funakubo and Tomoaki Yamada}, title = {Effects of composition and thickness on the domain structure in tensile-strained (PbxSr1-x)TiO3 thin films}, booktitle = {}, year = 2021, } @inproceedings{CTT100865385, author = {Takao Shimizu and Takanori Mimura and Yuki Tashiro and Takanori Kiguchi and Takahisa Shiraishi and Toyohiko J. Konno and Osami Sakata and Hiroshi Funakubo}, title = {Field-induced structural change in HfO2-based ferroelectric materials}, booktitle = {}, year = 2021, } @inproceedings{CTT100865387, author = {Tomoaki Yamada and Yuto Ota and Masahito Yoshino and Daisuke Ichinose and Takao Shimizu and Hiroshi Funakubo and Takanori Nagasaki}, title = {Two-step Phase Transition Behavior in Tensile-strained (PbxSr1-x)TiO3 Thin Films below 50 nm Thickness}, booktitle = {}, year = 2021, } @inproceedings{CTT100865388, author = {Yoshiomi Hiranaga and Takanori Mimura and Takao Shimizu and Hiroshi Funakubo and Yasuo Cho}, title = {Local C-V Characterization for Ferroelectric Films}, booktitle = {}, year = 2021, } @inproceedings{CTT100865390, author = {Shinnosuke Yasuoka and Takao Shimizu and Masato Uehara and Hiroshi Yamada and Morito Akiyama and Yoshiomi Hiranaga and Yasuo Cho and Hiroshi Funakubo}, title = {Downscaling and low temperature deposition of ferroelectric (Al1-xScx)N thin films deposited by dual sputtering}, booktitle = {}, year = 2021, } @inproceedings{CTT100865540, author = {Shimizu, T. and Mimura, T. and Tashiro, Y. and Sakata, O. and Funakubo, H}, title = {Phase transition in HfO2 ferroelectric materials investigated by XRD study}, booktitle = {}, year = 2021, } @inproceedings{CTT100865379, author = {Takao Shimizu and Takanori Mimura and Yuki Tashiro and Takahisa Shiraishi and Takanori Kiguchi and Toyohiko J. Konno and Osami Sakata and Yoshio Katsuya and Hiroshi Funakubo}, title = {Structure Change in the HfO2 Ferroelectric Materials Induced by an Electric Field}, booktitle = {}, year = 2021, } @inproceedings{CTT100865036, author = {Hiroshi Funakubo and Takanori Mimura and Reijiro Shimura and Yoshiko Nakamura and Takao Shimizu}, title = {Stability and Room Temperature Deposition of Ferroelectric Phase in Y-Doped (Hf, Zr)O2 Films}, booktitle = {}, year = 2021, } @inproceedings{CTT100853379, author = {森川 友秀 and 小寺 正徳 and 清水 荘雄 and 江原 祥隆 and 舟窪 浩}, title = {種々の格子定数を有するSr(Zr, Ti)O3バッファー層上に製膜したPbTiO3薄膜のドメイン構造に関する検討}, booktitle = {}, year = 2021, } @inproceedings{CTT100853366, author = {志村礼司郎 and 三村和仙 and 舘山明紀 and 清水荘雄 and 白石貴久 and 舟窪浩}, title = {スパッタリング法によるY-HZO強誘電体厚膜の室温製膜とその電気特性および圧電特性評価}, booktitle = {}, year = 2021, } @inproceedings{CTT100853357, author = {水谷涼一 and 安岡慎之介 and 清水荘雄 and 舟窪浩}, title = {(ScxAl1-x)N薄膜の強誘電性の温度依存性}, booktitle = {}, year = 2021, } @inproceedings{CTT100853348, author = {安岡慎之介 and 清水荘雄 and 舟窪浩}, title = {エピタキシャル(Al1-xScx)N膜の作製と強誘電性評価}, booktitle = {}, year = 2021, } @inproceedings{CTT100853344, author = {石濱圭佑 and 舘山明紀 and 清水荘雄 and 佐藤祐介 and 山岡和希子 and 石田未来 and 舟窪浩}, title = {種々の基板上に成長した正方晶(1-x)(Bi,Na)TiO3-xBaTiO3膜の特性評価}, booktitle = {}, year = 2021, } @inproceedings{CTT100853331, author = {平永良臣 and 三村和仙 and 清水荘雄 and 舟窪浩 and 長康雄}, title = {強誘電体膜における分極反転挙動のナノスケールマッピング}, booktitle = {}, year = 2021, } @inproceedings{CTT100853324, author = {Takanori Mimura and Takao Shimizu and Hiroshi Funakubo}, title = {Thickness and composition dependences of epitaxial ferroelectric HfO2 based films}, booktitle = {}, year = 2021, } @inproceedings{CTT100853321, author = {清水荘雄 and 江原祥隆 and 三村和仙 and 安井伸太郎 and 山田智明 and 今井康彦 and 坂田修身 and 舟窪浩}, title = {時間分解XRD測定による周期電界下における菱面体PZTの(111)/(-111)ドメイン構造の観察}, booktitle = {}, year = 2020, } @inproceedings{CTT100853270, author = {石濱圭佑 and 舘山明紀 and 佐藤祐介 and 山岡和希子 and 石田未来 and 清水荘雄 and 舟窪浩}, title = {正方晶 (1-x)(Bi, Na)TiO3-xBaTiO3膜の評価}, booktitle = {}, year = 2020, } @inproceedings{CTT100853267, author = {清水荘雄 and 田代裕貴 and 三村和仙 and 舟窪浩}, title = {HfO2基材料における強誘電相生成機構}, booktitle = {}, year = 2020, } @inproceedings{CTT100853255, author = {志村礼司郎 and 三村和仙 and 舘山明紀 and 清水荘雄 and 舟窪浩}, title = {スパッタリング法によるHfO2基強誘電体厚膜のシリコン基板上への室温製膜とその電気特性および圧電特性評価}, booktitle = {}, year = 2020, } @inproceedings{CTT100853246, author = {安岡慎之介 and 清水荘雄 and 上原雅人 and 山田浩志 and 秋山守人 and 舟窪浩}, title = {スパッタリング法で室温合成した(Al1-xScx)N膜の強誘電性評価}, booktitle = {}, year = 2020, } @inproceedings{CTT100853001, author = {舘山明紀 and 伊東良晴 and 清水荘雄 and 折野裕一郎 and 黒澤実 and 舟窪浩}, title = {縦振動を用いた薄膜の正逆圧電応答同時評価法の提案}, booktitle = {}, year = 2020, } @inproceedings{CTT100853000, author = {森川友秀 and 小寺正徳 and 江原祥隆 and 清水荘雄 and 舟窪浩}, title = {歪フリーなPb(Zrx,Ti1-x)O3薄膜の作製法の検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100852997, author = {小寺正徳 and 舟窪浩 and 田口綾子 and 森分博紀 and 清水荘雄}, title = {ReO3構造酸フッ化物薄膜の誘電体応⽤可能性}, booktitle = {}, year = 2020, } @inproceedings{CTT100852845, author = {Hiroshi Funakubo and Takanori Mimura and Takao Shimizu}, title = {High stability of Ferroelectric phase in Y-doped HfO2 films}, booktitle = {}, year = 2020, } @inproceedings{CTT100852900, author = {J. Molina and T. Mimura and Y. Nakamura and T. Shimizu and H. Funakubo and I. Fujiwara and T. Hoshii and S. Ohmi and A. Hori and H. Wakabayashi and K. Tsutsui and K. Kakushima}, title = {Interface engineering of BEOL compatible ferroelectric Y:HfO2 device for enhanced endurance}, booktitle = {}, year = 2020, } @inproceedings{CTT100852990, author = {舘山明紀 and 伊東良晴 and 清水荘雄 and 黒澤実 and 折野裕一郎 and 吉村武 and 舟窪浩}, title = {水熱合成法で作製した自己分極(K,Na)NbO3 膜の正・逆圧電特性評価}, booktitle = {}, year = 2020, } @inproceedings{CTT100852992, author = {江原祥隆 and 一ノ瀬大地 and 中島崇明 and 清水荘雄 and 山田智明 and 舟窪浩 and 西田謙}, title = {格子定数の異なる単結晶基板上に作成したPbTiO3 エピタキシャル薄膜の構造変化}, booktitle = {}, year = 2020, } @inproceedings{CTT100852901, author = {安岡 慎之介 and 清水 荘雄 and 上原雅人 and 山田浩志 and 秋山守人 and 舟窪 浩}, title = {二次元スパッタリング法により作製した(Al1-xScx)N 薄膜の強誘電特性}, booktitle = {}, year = 2020, } @misc{CTT100876024, author = {清水 荘雄 and 三村 和仙 and 舟窪 浩}, title = {HfO2基材料における強誘電性の発現機構}, year = 2021, } @misc{CTT100876025, author = {舟窪 浩 and 安岡 慎之介 and 水谷 涼一 and 清水 荘雄}, title = {ウルツ鉱構造窒化物の強誘電性}, year = 2021, } @misc{CTT100876028, author = {舟窪 浩 and 安岡 慎之介 and 清水 荘雄}, title = {ウルツ鉱構造窒化物の強誘電性 ―強誘電体の脱ペロブスカイト構造酸化物―}, year = 2021, } @misc{CTT100876023, author = {江原 祥隆 and 清水 荘雄 and 舟窪 浩}, title = {高速電界印加時の ドメイン構造変化を 利用した高性能 PZT 薄膜の開発}, year = 2021, }