@article{CTT100928603,
  author = {Naoki Matsunaga and Shinya Imai and Takanori Shirokura and Yasuhide Mochizuki and Kazuaki Kuwahata and Kazuo Tsutsui and Kuniyuki Kakushima and Hitoshi Wakabayashi},
  title = {Impact of Underlying Insulators on the Crystallinity and Antisite Defect Formation in PVD-MoS2 Films},
  journal = {Journal of the Electron Devices Society},
  year = 2024,
}