@inproceedings{CTT100672427, author = {K. Tuokedaerhan and Shuhei Hosoda and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Mobility Improvement of La-silicate MOSFET by W2C Gate Electrode}, booktitle = {K. Tuokedaerhan, S. Hosoda, K. Kakushima, Y. Kataoka, A. Nishiyama, N. Sugii, H. Wakabayashi, K. Tsutsui, K. Natori, H. Iwai, “Mobility Improvement of La-silicate MOSFET by W2C Gate Electrode”, The Workshop on Future Trend of Nanoelectronics:WIMNACT 39, February 7, 2014, Suzukake Hall, Suzukakedai Campus, Tokyo Institute of Technology, Japan}, year = 2014, } @inproceedings{CTT100672966, author = {Shuhei Hosoda and Kamale Tuokedaerhan and Kuniyuki KAKUSHIMA and KAZUO TSUTSUI and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Atomically flat interface of La-silicate/Si with W2C gate electrodes}, booktitle = {}, year = 2014, } @inproceedings{CTT100673460, author = {Tuokedaerhan Kamale and Shuhei Hosoda and Kuniyuki KAKUSHIMA and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {W2Cゲート電極によるLa-silicate MOSFETの移動度改善}, booktitle = {}, year = 2014, } @inproceedings{CTT100673471, author = {細田修平 and Tuokedaerhan Kamale and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {W2C電極導入によるLa-silicate/Siにおける平坦な界面の実現}, booktitle = {}, year = 2014, } @inproceedings{CTT100669358, author = {K. Tuokedaerhan and Shuhei Hosoda and Yoshinori Nakamura and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Influence of Carbon Incorporation in W Gate Electrode for La-silicate Gate Dielectrics}, booktitle = {}, year = 2014, } @inproceedings{CTT100830488, author = {Shuhei Hosoda and Kamale Tuokedaerhan and Kuniyuki Kakushima and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and Kazuo Tsutsui and Kenji Natori and Hiroshi Iwai}, title = {Reliability of La-Silicate Mos Capacitors With Tungsten Carbide Gate Electrode}, booktitle = {}, year = 2013, } @inproceedings{CTT100669173, author = {Shuhei Hosoda and K. Tuokedaerhan and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Reliability of La-silicate MOS capacitors with tungsten carbide gate electrode for scaled EOT}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100662336, author = {中村嘉基 and 細田修平 and Tuokedaerhan Kamale and 角嶋邦之 and 片岡好則 and 西山彰 and 若林整 and 杉井信之 and 筒井一生 and 名取研二 and 岩井洋}, title = {W2Cゲート電極とLa-silicateゲート絶縁膜を用いたMOSキャパシタの信頼性評価}, booktitle = {}, year = 2013, } @inproceedings{CTT100658389, author = {Shuhei Hosoda and K. Tuokedaerhan and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Improvenents in interface, states with W-carbide metal gate for La2O3/si MOS Capacitor}, booktitle = {}, year = 2013, } @inproceedings{CTT100658134, author = {K. Tuokedaerhan and Shuhei Hosoda and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Work Function Extraction of W,Ta and Ti Carbides Formed by Multi Stacked Process}, booktitle = {}, year = 2013, }