@article{CTT100749255, author = {Tatsuya Sodekoda and Shintaro Kurata and Hajime Kuwabara and Tomoaki Kawasaki and Shotaro Kittaka and Kazuhiko Horioka}, title = {Laser-Assisted Counter-Facing Plasma Focus Device as a Light Source for EUV Lithography}, journal = {IEEE Transactions on Plasma Scienece}, year = 2017, } @inproceedings{CTT100685886, author = {狩野弘毅 and 川崎朋晃 and 西井大亮 and 桑原 一 and 袖子田竜也 and 徳地 明 and 堀岡一彦}, title = {対向プラズマフォーカス型EUV光源装置の準定常動作}, booktitle = {}, year = 2014, } @inproceedings{CTT100684930, author = {Kazuhiko Horioka and Hajime Kuwabara and Tatsuya Sodekoda and Kouki Kanou and Tomoaki Kawasaki and Daisuke Nishii and Akira Tokuchi}, title = {Quasi-steady Operation of Counter-facing Plasma Focus Device for High-Power Radiation Source in Extreme-ultraviolet Region}, booktitle = {Conference Abstract}, year = 2014, }