@inproceedings{CTT100591879, author = {Sen Yao and Shunji Goto and Ryo Tanabe and Tadahiko Shinshi and Minoru Uehara and Hitoshi Yamamoto}, title = {Positioning Control of a Cantilever Type Micro Actuator Using High-performance NdFeB/Ta Thin Film Magnets and Built-in Displacement Sensor}, booktitle = {Proceedings of the 2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment}, year = 2009, } @inproceedings{CTT100592066, author = {田辺 亮 and 後藤駿治 and SEN YAO and 進士忠彦 and 上原稔 and 山本日登志}, title = {高性能薄膜ネオジム永久磁石を用いた2自由度駆動型マイクロアクチュエータ}, booktitle = {第21回「電磁力関連のダイナミクス」シンポジウム講演論文集}, year = 2009, } @inproceedings{CTT100569827, author = {Sen Yao and Shunji Goto and Junpei Sakurai and TADAHIKO SHINSHI and Minoru Uehara and Hitoshi Yamamoto}, title = {SiN-based Micro Cantilever Actuators Using NdFeB/Ta Permanent Magnetic Thin Film}, booktitle = {The 4th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems}, year = 2009, } @inproceedings{CTT100569927, author = {上原稔 and 後藤駿治 and Sen Yao and 進士忠彦 and 櫻井淳平 and 上原稔 and 山本日登志}, title = {薄膜ネオジム磁石を用いたマイクロアクチュエータの試作と位置決め制御}, booktitle = {電磁現象および電磁力に関するコンファレンス講演論文集}, year = 2008, } @inproceedings{CTT100570410, author = {Sen Yao and Shunji Goto and Junpei Sakurai and Tadahiko Shinshi and Minoru Uehara}, title = {Micro Cantilever Type Magnetic Actuators Using NdFeB Thin Film}, booktitle = {2008年度精密工学会秋季大会学術講演会講演論文集}, year = 2008, } @inproceedings{CTT100570293, author = {Tadahiko SHINSHI and Shunji GOTO and Xiaoyou ZHANG and Akira SHIMOKOHBE and Setsuo TAKATANI}, title = {A Mini-Centrifugal Blood Pump Using 2-DOF Controlled Magnetic Bearing}, booktitle = {Proceedings of 11th International Symposium on Magnetic Bearings (ISMB11)}, year = 2008, } @inproceedings{CTT100548042, author = {後藤駿治 and 進士忠彦 and PAI CHI NAN and 土方亘 and 下河邉明 and 高谷節雄}, title = {磁気軸受を用いた小型遠心血液ポンプ}, booktitle = {第50回自動制御連合講演会講演論文集}, year = 2007, }