@article{CTT100795920,
  author = {Ken Atsumi and Shota Otobe and Tatsuya Koga and Takashi Ichikawa and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers},
  journal = {IEEE Conference Paper},
  year = 2019,
}

@inproceedings{CTT100842068,
  author = {市川崇志 and 渥美賢 and 古賀達也 and 飯田慎一 and 石原昇 and 町田克之 and 益一哉 and 伊藤浩之},
  title = {100 nG/√Hzレベルを目指したピラー型電極を有する単一Au錘3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100842064,
  author = {Takashi Ichikawa and Ken Atsumi and Tatsuya Koga and Daisuke Yamane and Shin-ichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A 100-nG/√Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100816077,
  author = {市川 崇志 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {ピラー型電極による単一Au錘3軸MEMS加速度センサの感度均一化の検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100816076,
  author = {渥美 賢 and 古賀 達也 and 市川 崇志 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {ピラー型電極を用いた単一錘3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2020,
}

@inproceedings{CTT100809254,
  author = {市川 崇志 and 乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {3Dピラー型Au錘MEMS加速度センサ},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100807194,
  author = {市川 崇志 and 乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 曽根 正人 and 益 一哉},
  title = {Au錘3軸MEMS加速度センサのためのSCD電極の検討 (2)},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790677,
  author = {乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {Au錘3軸MEMS加速度センサのためのSCD電極の検討},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790673,
  author = {渥美 賢 and 乙部 翔太 and 古賀 達也 and 市川 崇志 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {積層メタル技術によるピラー型容量検出電極の検討},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100782446,
  author = {Daisuke Yamane and Shota Otobe and Ken Atsumi and Tatsuya Koga and Toshifumi Konishi and Teruaki Safu and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100777398,
  author = {Shota Otobe and Tatsuya Koga and Ken Atsumi and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Hiroyuki. Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes},
  booktitle = {},
  year = 2018,
}