@inproceedings{CTT100622339,
  author = {H. Kozako and J. Sakurai and N. Mukai and Y. Ohnuma and T. Takahashi and S. Hata},
  title = {Corrosion resistance consolidation of a diaphragm type vacuum sensor},
  booktitle = {The 25th IEEE Int. Conf. MEMS 2011},
  year = 2011,
}