@article{CTT100918404,
  author = {Yukimura Tokita and Takuya Hoshii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kuniyuki KAKUSHIMA},
  title = {Identification of compressive strain in thin ferroelectric Al1–xScxN films by Raman spectroscopy},
  journal = {Japanese Journal of Applied Physics},
  year = 2024,
}