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TUOKEDAERHANKAMALE 研究業績一覧 (8件)
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論文
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"K. Tuokedaerhan",
"K. Kakushima",
"Y. Kataoka",
"A. Nishiyama",
"N. Sugii",
"H. Wakabayashi",
"K. Tsutsui",
"K. Natori",
"H. Iwai".
Atomically flat La-silicate/Si interface using tungsten carbide gate electrode with nano-sized grain,
Applied Physics Letters (APL),
Vol. 104,
No. 2,
Jan. 2014.
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"K. Tuokedaerhan",
"R. Tan,
K. Kakushima",
"P. Ahmet",
"Y. Kataoka",
"A. Nishiyama",
"N. Sugii",
"H. Wakabayashi",
"K. Tsutsui",
"K. Natori",
"T. Hattori",
"H. Iwai".
Stacked sputtering process for Ti, Ta, and W carbide formation for gate metal application,
Applied Physics Letters (APL),
Vol. 103,
Sept. 2013.
国際会議発表 (査読有り)
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Shuhei Hosoda,
Kamale Tuokedaerhan,
Kuniyuki Kakushima,
Yoshinori Kataoka,
Akira Nishiyama,
Nobuyuki Sugii,
Hitoshi Wakabayashi,
Kazuo Tsutsui,
Kenji Natori,
Hiroshi Iwai.
Reliability of La-Silicate Mos Capacitors With Tungsten Carbide Gate Electrode,
224th ECS Meeting in San Francisco,
Oct. 2013.
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T. Kamale,
R. Tan,
K. Kakushima,
P. Ahmet,
Y. Kataoka,
A. Nishiyama,
N. Sugii,
K. Tsutsui,
K. Natori,
T. Hattori,
H. Iwai.
Interface Properties La-Silicate MOS Capacitors with Tungsten Carbide Gate Electrode for Scaled EOT,
PRiME 2012,
Oct. 2012.
国際会議発表 (査読なし・不明)
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Tohtarhan Kamal,
R. Tan,
Kuniyuki KAKUSHIMA,
パールハットアヘメト,
片岡好則,
Akira Nishiyama,
Nobuyuki Sugii,
KAZUO TSUTSUI,
Kenji Natori,
takeo hattori,
HIROSHI IWAI.
Interface Properties of La-silicate MOS Capacitors with Tungsten Carbide Gate Electrode for Scaled EOT,
ECS 222nd Meeting,
ECS Transactions,
Vol. 50,
No. 4,
pp. 281-284,
2012.
学位論文
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A Study on Metal Gate Electrodes with Nano-Sized Grains for Scalable La-silicate Gate Dielectrics,
Thesis,
Doctor (Engineering),
Tokyo Institute of Technology,
2014/03/26,
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A Study on Metal Gate Electrodes with Nano-Sized Grains for Scalable La-silicate Gate Dielectrics,
Summary,
Doctor (Engineering),
Tokyo Institute of Technology,
2014/03/26,
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A Study on Metal Gate Electrodes with Nano-Sized Grains for Scalable La-silicate Gate Dielectrics,
Exam Summary,
Doctor (Engineering),
Tokyo Institute of Technology,
2014/03/26,
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