@article{CTT100795920,
  author = {Ken Atsumi and Shota Otobe and Tatsuya Koga and Takashi Ichikawa and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers},
  journal = {IEEE Conference Paper},
  year = 2019,
}

@inproceedings{CTT100809254,
  author = {市川 崇志 and 乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {3Dピラー型Au錘MEMS加速度センサ},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100807194,
  author = {市川 崇志 and 乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 曽根 正人 and 益 一哉},
  title = {Au錘3軸MEMS加速度センサのためのSCD電極の検討 (2)},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790677,
  author = {乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {Au錘3軸MEMS加速度センサのためのSCD電極の検討},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100790673,
  author = {渥美 賢 and 乙部 翔太 and 古賀 達也 and 市川 崇志 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉},
  title = {積層メタル技術によるピラー型容量検出電極の検討},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100782446,
  author = {Daisuke Yamane and Shota Otobe and Ken Atsumi and Tatsuya Koga and Toshifumi Konishi and Teruaki Safu and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100777398,
  author = {Shota Otobe and Tatsuya Koga and Ken Atsumi and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Hiroyuki. Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100775380,
  author = {乙部 翔太 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {シングルAu錘と分割電極容量検出(SCD)方式を用いた3軸全差動MEMS加速度センサ},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100769399,
  author = {Shota Otobe and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Tri-Axis Fully-Differential MEMS Accelerometer with Segmented Capacitance Detection},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760805,
  author = {新島 宏文 and 乙部 翔太 and 高安 基大 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 年吉 洋 and 町田 克之 and 益 一哉},
  title = {高感度MEMS加速度センサのBrownian Noise評価に関する検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760801,
  author = {新島 宏文 and 乙部 翔太 and 高安 基大 and 山根 大輔 and 伊藤 浩之 and 佐布 晃昭 and 小西 敏文 and 道正 志郎 and 飯田 慎一 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {単一Au錘3軸差動MEMS加速度センサの検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100755388,
  author = {乙部 翔太 and 高安 基大 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {3軸MEMS加速度センサにおける単一Au錘および電極分割方式の検討},
  booktitle = {},
  year = 2017,
}

@inproceedings{CTT100753438,
  author = {Shouta Otobe and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes},
  booktitle = {},
  year = 2017,
}