論文

• Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone. A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices, Proceedings of the 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE Conference Publications, pp. 264 - 267, Aug. 2017.

著書

• Tso-Fu Mark Chang, Hideaki Nakajima, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Hiroshi Toshiyoshi, Masato Sone. Effective Young’s Modulus of Elelectrodeposited Gold for Design of MEMS Accelerometers, Advances in Microelectronics: Reviews, IFSA PUBLISHING, S.L., Vol. 3, Apr. 2021.

国際会議発表 (査読有り)

• Masato Sone, Hitomi Watanabe, Kyotaro Nitta, Hideaki Nakajima, Tomoyuki Kurioka, Chun-Yi Chen, Parthojit Chakraborty, Daisuke Yamane, Hiroyuki Ito, Katsuyuki. Machida, Yoshihiro Miyake, Tso-Fu Mark Chang. A Non-Distructive Resoneance Frequency Method to determine Effective young's Modulus of 3-Dimentional Multilayered Ti/Au Micro-cantilevers Toward Highly Sensitive MEMS Accerelometer, NEW METHODS OF DAMAGE AND FAILURE ANALYSES OF STRUCTURAL PARTS, Sept. 2022.
• Masato Sone, Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Hiroyuki Ito, Kazuya Masu. EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER, 8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS", 8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS", Sept. 2018.
• Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Hiroyuki Ito, Kazuya Masu, Masato Sone. Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device, 44rd International Conference on Micro & Nano Engineering (MNE2018), 44rd International Conference on Micro & Nano Engineering (MNE2018), Sept. 2018.
• HIdeaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, HIroshi Toshiyoshi, Hiroyuki Ito, Kazuya Masu, Masato Sone. A Study on Effective Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating, The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan, Nano Engineering and Microsystem Technology Conference, Taiwan, June 2018.
• Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu, Masato Sone. Young’s Modulus Evaluation of Ti/Au Micro-Cantilevers by Au Electrodeposition, IUMRS International Conference in Asia (IUMRS-ICA) 2017, Nov. 2017.
• Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone. A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices, IEEE-NEMS 2017, IEEE-NEMS 2017, Apr. 2017.
• Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hideaki Nakajima, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Hiroshi Toshiyoshi, Kazuya Masu. Young’s modulus evaluation of electroplated Ti/Au structures for MEMS devices, 29th International Microprocesses and Nanotechnology Conference (MNC 2016), pp. 10D-5-1, Nov. 2016.  公式リンク  
  

国内会議発表 (査読有り)

• 中島 英亮, Tso-Fu Mark Chang, Chun-Yi Chen, 山根 大輔, 小西 敏文, 町田 克之, 年吉 洋, 益 一哉, 曽根 正人. MEMS加速度センサに向けた金めっき微小カンチレバーのヤング率 に関する検討, 第79回応用物理学会秋季学術講演会, 第79回応用物理学会秋季学術講演会, Sept. 2018.
• 中島英亮, Chun-Yi Chen, Tso-Fu Mark Chang, ⼭根⼤輔, 小西敏文, 町⽥ 克之, 年吉洋, 益 ⼀哉, 曽根 正⼈. 電解めっき法によるTi/Au微⼩カンチレバーのヤング率評価, 応用物理学会第６５回春季講演会, 応用物理学会第65回春季講演会, Mar. 2018.

国内会議発表 (査読なし・不明)

• 中島 英亮, Chang Tso-Fu Mark, 陳 君怡, 小西 敏文, 町田 克之, 年吉 洋, 山根 大輔, 益 一哉, 曽根 正人. 積層メタル技術によるTi/Auめっき構造体のヤング率評価（2）, 応用物理学会 2017年春季講演会, 応用物理学会 2017年春季講演会, p. 14p-P3-15, Mar. 2017.
• 山根 大輔, 小西 敏文, 佐布 晃昭, 中島 英亮, 寺西 美波, 陳 君怡, Chang Tso-Fu Mark, 曽根 正人, 年吉 洋, 益 一哉, 町田 克之. 積層メタル技術によるTi/Auめっき構造体のヤング率評価（１）, 応用物理学会 2017年春季講演会, 応用物理学会 2017年春季講演会, p. 14p-P3-14, Mar. 2017.

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