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作地修 研究業績一覧 (5件)
- 2024
- 2023
- 2022
- 2021
- 2020
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国際会議発表 (査読有り)
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Osamu Sakuchi,
Fei Jiang,
Junzaburo Yamada,
Qiushi Zhu,
Masato Watanabe,
Tohru Kawamura,
Akitoshi Okino,
Kazuhiko Horioka,
Eiki Hotta.
Development of Xenon Gas-Jet Z-Pinch Discharge and Laser Triggered Tin Discharge Light Sources for EUV Lithography,
14th International Congress on Plasma Physics,
ICPP2008 Abstracts,
JSPF,
FG-P3-079,
p. 349,
Sept. 2008.
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Masato Watanabe,
Nozomu Kishi,
Junzaburo Yamada,
Osamu Sakuchi,
Jiang Fei,
Zhu Qiushi,
Akitoshi Okino,
Kazuhiko Horioka,
Eiki Hotta.
Experimental Study on Xenon and Tin Discharge Produced Plasma EUV Light Source,
The 35th IEEE International Conference on Plasma Science,
IEEE Conference Record Abstracts The 35th IEEE International Conference on Plasma Science,
IEEE,
1P67,
p. 170,
June 2008.
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Sakuchi Osamu,
Iizuka Naoya,
Jiang Fei,
Watanabe Masato,
Kawamura Tohru,
Okino Akitoshi,
Horioka Kazuhiko,
Hotta Eiki.
Development of a Gas Jet-Type Z-pinch Plasma Light Source for EUV Lithography,
The 25th Symposium on Plasma Processing (SPP-25),
Jan. 2008.
国内会議発表 (査読なし・不明)
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Y. Takimoto,
Huang Bin,
O. Sakuchi,
M. Watanabe,
E. Hotta.
Study of a Gas Jet Type Z-pinch EUV Light Source,
Frontiers of Particle Beam and High Energy Density Plasma Science using Pulse Power Technology,
Frontiers of Particle Beam and High Energy Density Plasma Science using Pulse Power Technology,
NIFS,
NIFS-PROC-87,
pp. 1-5,
Apr. 2011.
その他の論文・著書など
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堀田栄喜,
渡邊正人,
酒井雄祐,
富安邦彦,
清水政志,
作地修,
高橋俊輔,
山田淳三郎,
朱秋石,
横山快,
加藤大輔.
放電型ビーム核融合中性子源,
放射線利用実験報告書,
東京工業大学バイオ研究基盤支援センター,
Vol. 24,
pp. 29-32,
May 2009.
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