論文

• Kazuya Fujita, Kosuke Suzuki, Keisuke Asano, Chun-Yi Chen, Tomoyuki Kurioka, Katsuyuki. Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone, Tso-Fu Mark Chang. Simultaneous Necking and Barreling Deformation Behaviors in Bending of Single Crystal Gold Micro-Cantilever, Materials, MDPI, Vol. 17, No. 16, p. 4054, Aug. 2024.  公式リンク  
  
• Ryohei Hori, Kazuya Fujita, Chun Yi Chen, Tomoyuki Kurioka, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Cross-Sectional Geometry Effect on Bending Strength of Gold Micro-Cantilever with Trapezoidal Cross-Section, Micro and Nano Engineering, Vol. 23, p. 100259, May 2024.  公式リンク  
  
• Syota Kanno, Taro Omura, Tomoyuki Kurioka, Chun-Yi Chen, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone, Tso-Fu Mark Chang. Effect of Strain Rate in Compression Electrodeposited Gold Micro-Pillar toward Design of MEMS Component, Micro and Nano Engineering, Vol. 23, p. 100254, Apr. 2024.  公式リンク  
  
• Syunkai Watanabe, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Akira Onishi, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers  , Micro and Nano Engineering, Vol. 29, p. 100249, Mar. 2024.  公式リンク  
  
• Ryosuke Miyai, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Akira Onishi, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Clarification of Geometric Effects on Long-Term Structural Stability of Ti/Au Multi- Layered Micro-Cantilevers, Micro and Nano Engineering, Vol. 23, p. 100244, Mar. 2024.  公式リンク  
  
• Taro Omura, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Akira Onishi, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki ; Ito, Yoshihiro Miyake, Masato Sone. Warpage Study of the Electrodeposited-Au Micro-Components Having the Ti/Au Multi-layered Structures toward MEMS Applications, Journal of The Electrochemical Society, Vol. 171, p. 032501, Feb. 2024.  公式リンク  
  
• Kisuke Miyado, Devi Srujana Tenneti, Akira Onishi, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito. Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology, Japanese Journal of Applied Physics, Vol. 63, No. 4, p. 04SP23, Feb. 2024.  公式リンク  
  

国際会議発表 (査読有り)

• Masato Sone, Tso-Fu Mark Chang, Tomoyuki Kurioka, Chun-yi Chen, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake. Material Property Control of Multi-layered Ti/Au Microcomponents by Electroplating Toward Ultra high-Sensitive MEMS Inertial Sensors, 2024 ICGET-Tw: The 2024 International Conference on Green Electrochemical Technologies and the 2024 Annual Meeting of Electrochemical Society of Taiwan, 2024 ICGET-Tw, Nov. 2024.
• Tomoyuki Kurioka, Takumi Akiyama, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure Toward High-sensitive Accelerometers, CPIT2024, New Method of Damage and Failure Analysis of Structural Part, CPIT2024, New Method of Damage and Failure Analysis of Structural Part, Oct. 2024.
• Masato Sone, Ryohei Hori, Kazuya Fujita, Kosuke Suzuki, Ken Hashigata, Keisuke Asano, Tomoyuki Kurioka, Tso-Fu Mark Chang, Chun-Yi Chen, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake. Effects of Sample Geometry and Grain Size on Mechanical Property of Electrodeposited Dold and Gold-Copper Alloys by Micro-\bending Test Toward MEMS Applications, CPIT2024, New Method of Damage and Failure Analysis of Structural Part, CPIT2024, New Method of Damage and Failure Analysis of Structural Part, CPIT2024, New Method of Damage and Failure Analysis of Structural Part, Oct. 2024.
• Shunkai Watanabe, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Tenneti Devi Srujana, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Investigation of Effects of Applied Voltage on Effective Young’s modulus of Ti/Au Multi-Layered Micro-Cantilevers” New Method of Damage and Failure Analysis of Structural Part, CPIT2024, New Method of Damage and Failure Analysis of Structural Part, New Method of Damage and Failure Analysis of Structural Part, CPIT2024, New Method of Damage and Failure Analysis of Structural Part, Oct. 2024.
• Tatsuhiko Mori, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Evaluation of Warpage Behavior of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-Layered Structures caused by Thermal Treatment, CPIT2024, New Method of Damage and Failure Analysis of Structural Part, CPIT2024, New Method of Damage and Failure Analysis of Structural Part, Oct. 2024.
• Ryosuke Miyai, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Evaluation of the Effect of Heat Treatment on the Structural Stability of Au Micro-Cantilevers with Ti/Au Multi-layered Structures, 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), Sept. 2024.
• Tatsuhiko Mori, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure Toward High-sensitive Accelerometers, 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), Sept. 2024.
• Syunkai Watanabe, Shunkai Watanabe, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Tenneti Devi Srujana, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Dependence of Applied Voltage on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers, 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), Sept. 2024.
• Syota Kanno, Taro Omura, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Strain Rate Sensitivity in Gold Micro-Pillars: Designing MEMS Components with Grain Boundary and Sample Size Effects, 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), Sept. 2024.
• Kisuke Miyado, Torauto Yamada, Devi Srujana Tenneti, Chihaya Mukaide, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito. Effect of Perforated Proof-Mass Hole Size on Device Characteristics of Gold Single-Axis MEMS Accelerometer for Micro-g Level Sensing, 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), Sept. 2024.
• Devi Srujana Tenneti, Kisuke Miyado, Chihaya Mukaide, Torauto Yamada, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito. Suppression of Warpage in Perforated Proof-Mass of Gold Single-Axis MEMS Accelerometers for Micro-g Level Sensing, 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), 50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier), Sept. 2024.

国内会議発表 (査読有り)

• 菅野 翔太, 大村 太郎, 栗岡 智行, Chun-Yi Chen, 町田 克之, 伊藤 浩之, 三宅 美博, Tso-Fu Mark Chang, 曽根 正人. MEMS加速度センサへの応用に向けためっき金の微小圧縮試験によるひずみ速度依存性調査, 第71回応用物理学会春季学術講演会, Proc. The 71st JSAP Spring MeetinProc., p. 23a-12K-3, Mar. 2024.
• 森 達彦, 栗岡 智行, Chen Chun-Yi, Chang Tso-Fu Mark, 町田 克之, 伊藤 浩之, 三宅 美博, 曽根 正人. Ti/Au 積層電気金めっき錘の反り変形の熱処理温度依存性評価, 第71回応用物理学会春季学術講演会, Proc. The 71st JSAP Spring MeetinProc., p. 23a-12K-2, Mar. 2024.
• 宮井 良介, 栗岡 智行, Chun-Yi Chen, Tso-Fu Mark Chang, 町田 克之, 伊藤 浩之, 三宅 美博, 曽根 正人. Ti/Au 積層構造有するマイクロカンチレバーの 構造安定性に対する熱処理の影響評価, 第71回応用物理学会春季学術講演会, Proc. The 71st JSAP Spring MeetinProc., p. 23a-12K-1, Mar. 2024.

国内会議発表 (査読なし・不明)

• 三宅美博, 鈴木健二. 東京科学大学と企業を結ぶ産学連携による共同教育：サステイナブルな人材育成, データサイエンス PBL ケース・シンポジウム（数理・データサイエンス・AI教育強化拠点コンソーシアム主催）, Nov. 2024.

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