論文

• Qiushi Zhu, Takahiro Muto, Junzaburo Yamada, Nozomu Kishi, Masato Watanabe, Akitoshi Okino, Kazuhiko Horioka, Eiki Hotta. Estimation of electron temperature and density of the decay plasma in a laser-assisted discharge plasma extreme ultraviolet source by using a modified Stark broadening method, J. Appl. Phys., American Insitute of Phyics, Vol. 110, Dec. 2011.
• Q Zhu, J Yamada, N Kishi, M Watanabe, A Okino, K Horioka, E Hotta. Investigation of the dynamics of the Z-pinch imploding plasma for a laser-assisted discharge-produced Sn plasma EUV source, J. Phys. D: Appl. Phys., Institute of Physics, Vol. 44, 145203, pp. 1-11, Mar. 2011.
• Qiushi Zhu, Junzaburo Yamada, Nozomu Kishi, Tomonao Hosokai, Masato Watanabe, Akitoshi Okino, Kazuhiko Horioka, Eiki Hotta. Structure and Expansion Characteristics of Laser Ablation Tin Plasma into a Vacuum, Jpn. J. Appl. Phys., The Japan Society of Applied Physics, Vol. 49, 056201, pp. 1-6, May 2010.
• Junzaburo Yamada, Zhu Qiushi, Nozomu Kishi, Masato Watanabe, Akitoshi Okino, Tohru Kawamura, Kazuhiko Horioka, Eiki Hotta. Development of laser triggered tin discharge EUV light source, Pulsed Power Technology and Its Application to Plasma Science, Pulsed Power Technology and Its Application to Plasma Science, 核融合科学研究所, NIFS-PROC-79, pp. 1-5, Mar. 2009.
• S.R.Mohanty, T.Sakamoto, Y.Kobayashi, Naoya Iizuka, Nozomu Kishi, MASATO WATANABE, Tohru Kawamura, AKITOSHI OKINO, KAZUHIKO HORIOKA, E.Hotta. Influence of electrode separation and gas curtain on extreme ultraviolet emission of a gas jet z-pinch source, Applied Physics Letters, Vol. 89, No. 4, pp. 041502-1－3, July 2006.

国際会議発表 (査読有り)

• T. Muto, Q. Zhu, J. Yamada, N. Kishi, M. Watanabe, E. Hotta. Estimation of Electron Temperature and Density of the Decay Plasma in a Laser-assisted Discharge Plasma Extreme Ultraviolet Source by using a Modified Stark Broadening Method, 25th International Microprocesses and Nanotechnology Conference (MNC 2012), Oct. 2012.
• Qiushi Zhu, Junzaburo Yamada, Nozomu Kishi, Tomonao Hosokai, Masato watanabe, Akitoshi Okino, Kazuhiko Horioka, Eiki Hotta. Pinch dynamics of the 13.5 nm EUV-emitting plasma in a LA-DPP source, 2011 International Academic Symposium on Optoeletcronics and Microelectronics Technology (IASOMT 2011), 2011 International Academic Symposium on Optoeletcronics and Microelectronics Technology (IASOMT 2011), IEEE, pp. 175-178, Nov. 2011.
• Qiushi Zhu, Junzaburo Yamada, Nozomu Kishi, Masato Watanabe, Akitoshi Okino, Kazuhiko Horioka, Eiki Hotta. Effects of plasma dynamics on the EUV emission from laser assisted discharge produced Sn plasma EUV source, 2010 International Symposium on Extreme Ultraviolet Lithography, Web, Nov. 2010.
• Qiushi Zhu, Junzaburo Yamada, Nozomu Kishi, Tomonao Hosokai, Masato Watanabe, Akitoshi Okino, Kazuhiko Horioka, Eiki Hotta. Structure and Expansion Characteristics of Laser Ablation Tin Plasma into a Vacuum, 62nd Gaseous Electronics Conference, Aug. 2009.
• Eiki Hotta, Nozomu Kishi, Junzaburo Yamada, Qiushi Zhu, Tomonao Hosokai, Masato Watanabe, Akitoshi Okino. Plasma Dynamics in Laser Triggered Vacuum Arc Sn DPP EUV Source, 2008 International Symposium on Extreme Ultraviolet Lithography, 26, Oct. 2008.
• Masato Watanabe, Nozomu Kishi, Junzaburo Yamada, Osamu Sakuchi, Jiang Fei, Zhu Qiushi, Akitoshi Okino, Kazuhiko Horioka, Eiki Hotta. Experimental Study on Xenon and Tin Discharge Produced Plasma EUV Light Source, The 35th IEEE International Conference on Plasma Science, IEEE Conference Record Abstracts The 35th IEEE International Conference on Plasma Science, IEEE, 1P67, p. 170, June 2008.
• Qiushi Zhu, Junzaburo Yamada, Nozomu Kishi, Masato Watanabe, Akitoshi Okino, Eiki Hotta. EUV Radiation from Laser Triggered Tin Target Discharge Produced Plasma, 2008 International Workshop on EUV Lithography, SPIE, June 2008.
• Eiki Hotta, Yusuke Sakai, Nozomu Kishi, Masato Watanabe, Akitoshi Okino, Tohru Kawamura, Majid Masnavi, Kazuhiko Horioka. Discharge Produced Plasma EUV Light Source for Microlithography and Capillary Discharge SXR Laser, 2008 Academic Symposium on Optoelectronics & Microelectronics Technology, ASOMT 2008, Harbin Chapter of EDS, IEEE, p. 21, Jan. 2008.
• MASATO WATANABE, Nozomu Kishi, Naoya Iizuka, Shinya Orishimo, Fei Jiang, AKITOSHI OKINO, EIKI HOTTA. Optical Observation of Gas Jet Z-Pinch Discharge Produced Extreme Ultraviolet Light Source, 16th IEEE International Pulsed Power Conference, IEEE, pp. 1679-1682, Nov. 2007.  公式リンク  
  
• Masato Watanabe, Nozomu Kishi, Jiang Fei, Akitoshi Okino, Bong-Seong Kim, Kwang-Cheol Ko, Kazuhiko Horioka, Eiki Hotta. Development of Xe and Sn Discharge Produced Plasma Light Source for EUV Lithography, 2007 International EUVL Symposium, SEMATECH, pp. SO-P01, Oct. 2007.

国内会議発表 (査読有り)

• Qiushi Zhu, Junzaburo Yamada, Nozomu Kishi, Tomonao Hosokai, MASATO WATANABE, AKITOSHI OKINO, EIKI HOTTA. Plasma Behavior of Laser Assisted Sn Discharge EUV Source, 平成21年電気学会全国大会, 平成21年電気学会全国大会, 電気学会, 1-185, Mar. 2009.
• 渡邊正人, 岸望, 山田淳三郎, 堀田栄喜. レーザトリガ型EUV放電光源の開発, 平成２０年電気学会全国大会, 平成２０年電気学会全国大会講演論文集, 電気学会, Vol. 1, p. 60, Mar. 2008.

国際会議発表 (査読なし・不明)

• Qiushi Zhu, Junzaburo Yamada, Nozomu Kishi, Tomonao Hosokai, Masato Watanabe, Akitoshi Okino, Eiki Hotta. Study on Sn-Fueled Discharge Produced Plasma (DPP) Extreme Ultraviolet (EUV) Source, The 2nd Japanese-German Student Workshop on Plasma Science and Technology, July 2008.

国内会議発表 (査読なし・不明)

• Zhu Qiushi, Takahiro Muto, Junzaburo Yamada, Nozomu Kishi, Masato watanabe, Akitoshi Okino, Kazuhiko Horioka, Eiki Hotta. Estimation of electron temperature and density of the decay plasma in a LADPP EUV source, Joint Technical Meeting on Plasma Science and Technology and Pulsed Power Technology, The Papers of Joint Technical Meeting on Plasma Science and Technology and Pulsed Power Technology, IEE Japan, pp. 15-20, Dec. 2011.
• 山田 淳三郎, ｽﾞ ｷｭｼ, 岸 望, 渡邊 正人, MASNAVI MAJID, 沖野 晃俊, 河村 徹, 堀岡 一彦, 堀田 栄喜. レーザトリガ型Sn EUV放電光源の開発, パルスパワー・放電合同研究会, 電気学会パルスパワー・放電合同研究会資料, 電気学会, PPT-08-22/ED-08-51, pp. 37-42, May 2008.
• 山田淳三郎, 岸望, 渡邊正人, 沖野晃俊, 河村徹, 堀岡一彦, 堀田栄喜. レーザーアシストを用いたEUV光源の開発, パルスパワー研究会, 電気学会研究会資料, 電気学会, Vol. PPT-07-38～47, pp. 29-33, Nov. 2007.
• 岸望, 飯塚直哉, 坂本敏郎, 宋仁皓, 小林靖典, S.R. Mohanty, 渡辺正人, 沖野晃俊, 堀田栄喜. 同軸二重ノズル型電極を用いたEUV光源の出力特性, 平成１８年電気学会基礎・材料・共通部門大会, 平成１８年電気学会基礎・材料・共通部門大会（CD-ROM), pp. 259, Aug. 2006.

その他の論文・著書など

• 飯塚直也, 岸望, 姜飛, 渡邊正人, 沖野晃俊, 堀岡一彦, 堀田栄喜. 極端紫外光（ＥＵＶ）の絶対計測, 平成18年度共同研究報告書, 大阪大学レーザーエネルギー学研究センター, No. 8-2, pp. 199-200, Mar. 2008.

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