論文

• Tomohide Morikawa, Masanori Kodera, Takao Shimizu, Keisuke Ishihama, Yoshitaka Ehara, Osami Sakata, Hiroshi Funakubo. Domain structure of PbTiO3 and Pb(Zr, Ti)O3 thin films controlled by tensile strain induced from Sr(Zr,Ti)O3 buffer layer, Appl. Phys. Lett., vol. 124, pp. 032901, Jan. 2024.
• Keisuke Ishihama, Kazuki Okamoto, Akinori Tateyama, Takao Shimizu, Wakiko Yamaoka, Risako Tsurumaru, Shintaro Yoshimura, Yusuke Sato, Hiroshi Funakubo. Achieving High Piezoelectric Performance in Tetragonal (Bi,Na)TiO3-BaTiO3 Films Across a Wide Composition Range for MEMS Applications, ACS Appl. Mater. Interfaces 2024, vol. 16, pp. 1308−1316, Dec. 2023.
• Shinnosuke Yasuoka, Ryoichi Mizutani, Reika Ota, Takahisa Shiraishi, Takao Shimizu, Kazuki Okamoto, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Hiroshi Funakubo. Invariant polarization switching kinetics in an (Al0.2Sc0.8)N film with frequency and temperature, Appl. Phys. Lett., vol. 123, pp. 202902, Nov. 2023.
• José P. B. Silva, Ruben Alcala, Uygar E. Avci, Nick Barrett, Laura Bégon-Lours, Mattias Borg, Seungyong Byun, Sou-Chi Chang, Sang-Wook Cheong, Duk-Hyun Choe, Jean Coignus, Veeresh Deshpande, Athanasios Dimoulas, Catherine Dubourdieu, Ignasi Fina, Hiroshi Funakubo, Laurent Grenouillet, Alexei Gruverman, Jinseong Heo, Michael Hoffmann, H. Alex Hsain, Fei-Ting Huang, Cheol Seong Hwang, Jorge Íñiguez, Jacob L. Jones, Ilya V. Karpov, Alfred Kersch, Taegyu Kwon, Suzanne Lancaster, Maximilian Lederer, Younghwan Lee, Patrick D. Lomenzo, Lane W. Martin, Simon Martin, Shinji Migita, Thomas Mikolajick, Beatriz Noheda, Min Hyuk Park, Karin M. Rabe, Sayeef Salahuddin, Florencio Sánchez, Konrad Seidel, Takao Shimizu, Takahisa Shiraishi, Stefan Slesazeck, Akira Toriumi, Hiroshi Uchida, Bertrand Vilquin, Xianghan Xu, Kun Hee Ye, Uwe Schroeder. Roadmap on Ferroelectric Hafnia and Zirconia-based materials and devices, APL Mater., vol. 11, pp. 089201-1-70, Aug. 2023.
• Kodai Aoyama, Takao Shimizu, Hideto Kuramochi, Masami Mesuda, Ryo Akiike, Keisuke Ide, Takayoshi Katase, Toshio Kamiya, Yoshisato Kimura, Hiroshi Funakubo. Enhancement of thermoelectric properties of SrSi2 films by mixing cubic and trigonal phase, ACS Appl. Energy Mater. 2023, vol. 6, pp. 6593−6597, June 2023.
• Kodai Aoyama, Takao Shimizu, Hideto Kuramochi, Masami Mesuda, Ryo Akiike, Takayoshi Katase, Yoshisato Kimura, Hiroshi Funakubo. Enhanced Thermoelectric Properties of SrSi2 Composite Films with Cubic and Layered Polymorphs, ACS Appl. Energy Mater., Vol. 6, pp. 6593, June 2023.
• Takanori Mimura, Yuki Tashiro, Takao Shimizu, Hiroshi Funakubo. Systematic Investigation of Ferroelectric Properties in x%YO1.5-(100-x%)Hf1-yZryO2 Films, ACS Appl. Electron. Mater., 5, 3, 1600-1605, Feb. 2023.
• Akinori Tateyama, Yuichiro Orino, Yoshiharu Ito, Takahisa Shiraishi, Takao Shimizu, Minoru Kurosawa, Hiroshi Funakubo. Simultaneous high frequency measurement of both direct and inverse transverse piezoelectric coefficients of thin films using longitudinal vibration, Sensors and Actuators A: Physical, Vol. 354, 114265, Feb. 2023.
• Yoshitaka Ehara, Takaaki Nakashima, Daichi Ichinose, Shimizu Takao, Takahisa Shiraishi, OSAMI SAKATA, Tomoaki Yamada, Shintaro Yasui, ken nishida, HIROSHI FUNAKUBO. Film thickness dependence of in-plane ferroelastic domain structure in constrained tetragonal PbTiO3 films induced by isotropic tensile strain, Appl. Phys. Lett., 121, 262901, Dec. 2022.
• Shinnosuke Yasuoka, Ryoichi Mizutani, Reika Ota, Takahisa Shiraishi, Takao Shimizu, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Hiroshi Funakubo. Tunable Ferroelectric Properties in Wurtzite (Al0.8Sc0.2)N via Crystal Anisotropy, ACS Appl. Electron. Mater., Vol. 4, pp. 5165−5170, Oct. 2022.
• Masanori Kodera, Keisuke Ishihama, Takao Shimizu, Hiroshi Funakubo. Preferential growth of (001)-oriented Bi2SiO5 thin films deposited on (101)-oriented rutile substrates and their ferroelectric and dielectric properties, Scientific Reports, Vol. 12, 15204, Sept. 2022.
• Takanori Mimura, Takao Shimizu, Hiroshi Funakubo. Preparation of orthorhombic Y-doped TaON film, J Ceram Soc. Jpn., Vol. 130, No. 7, pp. 432-435, July 2022.
• Shinnosuke YASUOKA, Ryoichi MIZUTANI, Reika OTA, Takahisa SHIRAISHI, Takao SHIMIZU, Shintaro YASUI, Yoshitaka EHARA, Ken NISHIDA, Masato UEHARA, Hiroshi YAMADA, Morito AKIYAMA, Yasuhiko IMAI, Osami SAKATA, Hiroshi FUNAKUBO. Enhancement of crystal anisotropy and ferroelectricity by decreasing thickness in (Al,Sc)N films, J. Ceram. Soc. Jpn., Vol. 130, No. 7, pp. 436-441, July 2022.
• Yoshiomi Hiranaga, Takanori Mimura, Takao Shimizu, Hiroshi Funakubo, Yasuo Cho. Nanoscale Mapping Concerning Asymmetry of Local C-V Curves in Ferroelectric Materials, Jpn. J. Appl. Phy., Vol. 61, pp. SN1014-1-8, July 2022.
• Masato Uehara, Ryoichi Mizutani, Shinnosuke Yasuoka, Takao Shimizu, Hiroshi Yamada, Morito Akiyama, Hiroshi Funakubo. Lower ferroelectric coercive field of ScGaN with equivalent remanent polarization as ScAlN, Appl. Phys. Exp., Vol. 15, pp. 081003-1-5, July 2022.
• Tomoya Sato, Masanori Kodera, Daichi Ichinose, Takanori Mimura, Takao Shimizu, Tomoaki Yamada, Hiroshi Funakubo. Domain structures induced by tensile thermal strain in epitaxial PbTiO3 films on silicon substrates, J. Appl. Phys., Vol. 131, pp. 035301-1-9, Jan. 2022.
• Yoshiharu Ito, Akinori Tateyama, Rurika Kubota, Takahisa Shiraish, Takao Shimizu, Osami Sakata, Jaemyung Kim, Minoru Kurosawa, Hiroshi Funakubo. Polar-axis oriented epitaxial tetragonal (Bi,K)TiO3 films deposited below Curie temperature by hydrothermal method, Appl. Phys. Lett., Vol. 120, pp. 022903, Jan. 2022.
• Reijiro Shimura, Takanori Mimura, Akinori Tateyama, Takahisa Shiraishi, Takao Shimizu, Tomoaki Yamada, Yoshitomo Tanaka, Yukari Inoue, Hiroshi Funakubo. No-Heating Deposition of 1-μm-Thick Y-Doped HfO2 Ferroelectric Films with Good Ferroelectric and Piezoelectric Properties by Radio Frequency Magnetron Sputtering Method, Phys. Status Solidi RRL, Early View, Jan. 2022.
• Takao Shimizu, Miyu Hasegawa, Keisuke Ishihama, Akinori Tateyama, Wakiko Yamaoka, Risako Tsurumaru, Shintaro Yoshimura, Yusuke SATO, Hiroshi Funakubo. Piezoelectric responses beyond Pb(Zr,TiO)3 in Pb-free perovskite thin films by ferroelastic domain switching: Free from Pb and MPB, ACS Appl. Mater. Interfaces 2021, Vol. 13, pp. 57532−57539, Nov. 2021.
• Masato Uehara, Ryoichi Mizutani, Shinnosuke Yasuoka, Takahisa Shiraishi, Takao Shimizu, Hiroshi Yamada, Morito Akiyama, Hiroshi Funakubo. Demonstration of ferroelectricity in GaN-based thin film, Appl. Phys. Lett., Vol. 119, pp. 172901-1-5, Oct. 2021.
• Keisuke Ishihama, Takao Shimizu, Wakiko Yamaoka, Risako Tsurumaru, Shintaro Yoshimura, Yusuke Sato, Hiroshi Funakubo. Composition dependencies of crystal structure and electrical properties of epitaxial tetragonal (Bi, Na)TiO3-BaTiO3 films grown on (100)cSrRuO3//(100)SrTiO3 substrates by pulsed laser depositions, J. Appl. Phys., Vol. 130, pp. 134102-1-9, Oct. 2021.
• Shinnosuke Yasuoka, Takao Shimizu, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Hiroshi Funakubo. Impact of deposition temperature on crystal structure and ferroelectric properties of (Al1-xScx)N films prepared by sputtering method, Phys. Status Solidi A 2021, pp. 2100302-1-6, Sept. 2021.
• Ryoichi Mizutani, Shinnosuke Yasuoka, Takahisa Shiraishi, Takao Shimizu, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Osami Sakata, Hiroshi Funakubo. Thickness scaling of (Al0.8Sc0.2)N films with remanent polarization beyond 100 μC/cm2 around 10 nm in thickness, Appl. Phys. Exp., Vol. 14, pp. 105501, Sept. 2021.
• Hiranaga Yoshiomi, Mimura Takanori, Shimizu Takao, Funakubo Hiroshi, Cho Yasuo. High-precision Local C-V Mapping for Ferroelectrics Using Principal Component Analysis, Jpn. J. Appl. Phys., Vol. 60, pp. SFFB09-1-8, Aug. 2021.
• Yoshitaka Ehara, Daichi Ichinose, Masanori Kodera, Takahisa Shiraishi, Takao Shimizu, Tomoaki Yamada, Ken Nishida, Hiroshi Funakubo. Influence of cooling rate on ferroelastic domain structure for epitaxial (100)/(001)-oriented Pb(Zr, Ti)O3 thin films under tensile strain, Jpn. J. Appl. Phys., Vol. 60, pp. SFFB07-1-6, July 2021.
• Keisuke Ishihama, Masanori Kodera, Takao Shimizu, Wakiko Yamaoka, Risako Tsurumaru, Shintaro Yoshimura, Yusuke Sato, Hiroshi Funakubo. Growth of 0.1(Bi, Na)TiO3-0.9BaTiO3 epitaxial films by pulsed laser deposition and their electric properties, J.Ceram. Soc. Jpn., Vol. 129, No. 7, pp. 337-342, July 2021.
• Yuki Tashiro, Takao Shimizu, Takanori Mimura, Hiroshi Funakubo. Comprehensive study on the kinetic formation of the orthorhombic ferroelectric phase in epitaxial Y-doped ferroelectric HfO2 thin films, ACS Applied Electronic Materials 2021, Vol. 3, No. 7, pp. 3123-3130, June 2021.
• Yuki Tashiro, Takao Shimizu, Takanori Mimura, Hiroshi Funakubo. Comprehensive study on the kinetic formation of the orthorhombic ferroelectric phase in epitaxial Y-doped ferroelectric HfO2 thin films, ACS Applied Electronic Materials 2021, Vol. 3, No. 7, pp. 3123-3130, June 2021.
• Reijiro Shimura, Takanori Mimura, Akinori Tateyama, Takao Shimizu, Tomoaki Yamada, Hiroshi Funakubo. Preparation of 1 μm-thick Y-doped HfO2 ferroelectric films on (111)Pt/TiOx/SiO2/(001)Si substrates by a sputtering method and their ferroelectric and piezoelectric properties, Jpn. J. Appl. Phys., vol. 60, pp. 031009, Mar. 2021.
• Takanori Mimura, Takao Shimizu, Osami Sakata, Hiroshi Funakubo. Large Thermal hysteresis of ferroelectric transition in HfO2-based ferroelectric films, Appl. Phys. Let., vol. 118, pp. 112903, Mar. 2021.
• Takao Shimizu, Yuki Tashiro, Takanori Mimura, Takanori Kiguchi, Takahisa Shiraishi, Toyohiko J. Konnno, Osami Sakata, Hiroshi Funakubo. Electric-field-induced ferroelectricity in 5%Y-doped Hf0.5Zr0.5O2: Transformation from the paraelectric tetragonal phase to the ferroelectric orthorhombic phase, Physica Status Solidi, vol. 15, no. 5, pp. 2000589-1-7, Feb. 2021.
• Daichi Ichinose, Takao Shimizu, Osami Sakata, Tomoaki Yamada, Yoshitaka Ehara, Hirosh Funakubo. Domain structure transition in compressive strained (100)/(001) epitaxial tetragonal PZT film, J. Appl. Phys., vol. 129, pp. 024101-1-6, Jan. 2021.
• Yoshiomi Hiranaga, Takanori Mimura, Takao Shimizu, Hiroshi Funakubo, Yasuo Cho. Local C-V mapping for ferroelectrics using scanning nonlinear dielectric microscopy, J. Appl. Phys., vol. 128, pp. 244105, Dec. 2020.
• Atsuo Katagiri, Mutsuo Uehara, Mao Kurokawa, Kensuke Akiyama, Takao Shimizu, Masaaki Matsushima, Hiroshi Uchida, Yoshisato Kimura, Hiroshi Funakubo. Composition Dependence of Crystal Structures and Electrical Properties of Ca-Mg-Si Films Prepared by Sputtering, Journal of ELECTRONIC MATERIALS, vol. 49, no. 12, pp. 7509-7517, Oct. 2020.
• Masanori Kodera, Takao Shimizu, Hiroshi Funakubo. Epitaxial Crystal Growth of Bismuth Silicate Driven by Fluorite-Like Layers, Cryst. Growth Des., vol. 20, pp. 7163−7169, Sept. 2020.
• Akinori Tateyama, Yoshiharu Ito, Yoshiko Nakamura, Takao Shimizu, Yuichiro Orino, Minoru Kurosawa, Hiroshi Uchida, Takahisa Shiraishi, Takanori Kiguchi, Toyohiko J. Konno, Takeshi Yoshimura, Hiroshi Funakubo. Good piezoelectricity of self-polarized thick epitaxial (K,Na)NbO3 films grown below the Curie temperature (240°C) using a hydrothermal method, Appl. Phys. Lett., vol. 117, pp. 142903-1-6, Sept. 2020.
• Shinnosuke Yasuoka, Takao Shimizu, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Yoshiomi Hiranaga, Yasuo Cho, Hiroshi Funakubo. Effects of deposition conditions on the ferroelectric properties of (Al1-xScx)N thin films, J. Appl. Phys., vol. 128, pp. 114103-1-11, Sept. 2020.
• Hiroki Tanaka, Kiyoshi Uchiyama, Takao Shimizu, Hiroshi Funakubo. Optimization of deposition conditions of Y doped-SrZrO3 thin films fabricated by pulsed laser deposition, J. Ceram. Soc. Jpn., vol. 128, no. 8, pp. 436-440, Aug. 2020.
• Akinori Tateyama, Yoshiharu Ito, Takao Shimizu, Yuichiro Orino, Minoru Kurosawa, Takeshi Yoshimura, Hiroshi Funakubo. Composition dependency of direct and inverse transverse piezoelectric property in self-polarized epitaxial (KxNa1-x)NbO3 films grown by hydrothermal method, Jpn. J. Appl. Phys., vol. 59, pp. SPPC03-1-7, Aug. 2020.
• Yoshiharu Ito, Akinori Tateyama, Yoshiko Nakamura, Takao Shimizu, Minoru Kurosawa, Hiroshi Uchida, Takahisa Shiraishi, Takanori Kiguchi, Toyohiko J. Konno, Mutsuo Ishikawa, Nobuhiro Kumada, Hiroshi Funakubo. High yield preparation of (100)c-oriented (K,Na)NbO3 thick films by hydrothermal method using amorphous niobium source, J. Ceram. Soc. Jpn., vol. 128, no. 8, pp. 512-517, Aug. 2020.
• Reijiro Shimura, Takanori Mimura, Takao Shimizu, Yoshitomo Tanaka, Yukari Inoue, Hiroshi Funakubo. Preparation of near-1-μm-thick {100}-oriented epitaxial Y-doped HfO2 ferroelectric films on (100)Si substrates by an RF magnetron sputtering method, J.Ceram. Soc. Jpn, vol. 128, no. 8, pp. 539-543, Aug. 2020.
• Yoshitaka Ehara, Takaaki Nakashima, Daichi Ichinose, Takao Shimizu, Tomoaki Yamada, Ken Nishida, Hiroshi Funakubo. Temperature dependence on the domain structure of epitaxial PbTiO3 films grown on single-crystal substrates with different lattice parameters, Jpn. J. Appl. Phys., vol. 59, pp. SPPB01-1-5, July 2020.
• Mitsumasa Nakajima, Takao Shimizu, Hiroshi Nakaki, Tomoaki Yamada, Ayumi Wada, Takaaki Nakashima, Yoshitaka Ehara, Hiroshi Funakubo. Large electromechanical responses driven by electrically induced dense ferroelastic domains:beyond morphotropic phase boundary, ACS Appl. Electron. Mater. 2020, vol. 2, pp. 1908−1916, June 2020.

国際会議発表 (査読有り)

• Keisuke Ishihama, Kazuki Okamoto, Masanori Kodera, Tomohide Morikawa, Takao Shimizu, Hiroshi Funakubo. Exploring the Impact of Sr(Zr,Ti)O3 Buffer Layers for Controlling Domain Structure of Ferroelectric Thin Films, 2023 MRS Fall Meeting & Exhibit, Nov. 2023.
• Shinnosuke Yasuoka, Kazuki Okamoto, Takao Shimizu, Hiroshi Funakubo. Characterization of Ferroelectric Switching Properties for (Al,Sc)N Films with Various Composition, 2023 MRS Fall Meeting & Exhibit, Nov. 2023.
• Masato Uehara, Ryoichi Mizutani, Shinnosuke Yasuoka, Takao Shimizu, Hiroshi Yamada, Morito Akiyama, Hiroshi Funakubo. Demonstration of Ferroelectric Properties in GaN Alloyed with Sc, 2022 MRS Fall Meeting & Exhibit, Dec. 2022.
• Pratyush P. Buragohain, Sangita Dutta, Haidong Lu, Sebastjan Glinsek, Hugo Aramberri, Claudia Richter, Pamenas Kariuki, Terence Mittmann, Takanori Mimura, Takao Shimizu, Hiroshi Funakubo, Uwe Schroeder, Emmanuel Defay, Jorge Iniguez, Alexei Gruverman. Observation of Negative Piezoelectricity in HfO2-Based Thin-Film Capacitors, 2022 MRS Spring Meeting & Exhibit, May 2022.
• Pratyush P. Buragohain, Adam Erickson, Takanori Mimura, Takao Shimizu, Hiroshi Funakubo, Alexei Gruverman. Intrinsic Switching in Ferroelectric Y:HfO2 Thin Film Capacitors, 2022 MRS Spring Meeting & Exhibit, May 2022.
• Shinnosuke Yasuoka, Ryoichi Mizutani, Reika Ota, Takahisa Shiraishi, Takao Shimizu, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Hiroshi Funakubo. Establishment of Control Method for Ferroelectric Properties in (Al1-xScx)N Films, 2022 MRS Spring Meeting & Exhibit, May 2022.

国内会議発表 (査読有り)

• 青山航大, 清水荘雄, 倉持豪人, 召田雅実, 秋池良, 片瀬貴義, 木村好里, 舟窪浩. (Ba,Sr,Ca)Si2膜の作製と熱電特性評価, 第21回 日本熱電学会学術講演会, Sept. 2024.

国際会議発表 (査読なし・不明)

• Hiroshi Funakubo, Kazuki Okamoto, Takao Shimizu, Tomoaki Yamada. Progress of Research on None-Perovskite Dielectric Materials, STAC-D2MatE 2024 (The International Conference on the Science and Technology for Advanced Ceramics – Data Driven Materials Research for Electronics 2024), Feb. 2024.
• Hiroshi Funakubo, Takao Shimizu, Takanori Mimura, Kazuki Okamoto. Ferroelectric and Piezoelectric Properties of Non-perovskite Simple Oxide, MRM2023/IUMRS-ICA2023, Dec. 2023.
• Yoshiki Maekawa, Koji Hirai, Kazuki Okamoto, Takao Shimizu, Hiroshi Funakubo. Orientation Control of {100}-oriented Epitaxial Y-doped HfO2 Thin Films Using Lattice Matching, IWDTF2023 (2023 International Workshop on Dielectric Thin Films for Future Electron Devices - Science and Technology), Oct. 2023.
• Hiroshi Funakubo, Yuma Takahashi, Takahisa Shiraishi, Kodera Masanori, Reijiro Shimura, Takanori Mimura, Keisuke Ishihama, Kazuki Okamoto, Hiroki Moriwake, Ayako Taguchi, Takao Shimizu, Yasuhiro Fujii, Akitoshi Koreeda. Stabilization and Identification of Ferroelectric HfO2 Thin Films, IWDTF2023 (2023 International Workshop on Dielectric Thin Films for Future Electron Devices - Science and Technology), Oct. 2023.
• H. Funakubo, T. Shimizu, T. Mimura, T. Shiraishi, K. Okamoto. Impact of electric field on crystal structure and properties of HfO2-based ferroelectric films, E-MRS 2023 Fall Meeting, Sept. 2023.
• Hiroshi Funakubo, Akinori Tateyama, Yuichiro Orino, Yoshiharu Ito, Takahisa Shiraishi, Takao Shimizu, Minoru Kurosawa. Characterization of Piezoelectric (K, Na)NbO3 Films for MEMS Applications, ISAF 2023 (IEEE International Symposium on Applications of Ferroelectrics), June 2023.
• Hiroshi Funakubo, Shinnosuke Yasuoka, Ryoichi Mizutani, Takahisa Shiraishi, Akinori Tateyama, Reika Ota, Kazuki Okamoto, Takao Shimizu, Masato Uehara, Hiroshi Yamada, Morito Akiyama. Thickness Scaling and Low Voltage Operation of Ferroelectric (Al1-xScx)N Films Prepared by Sputtering Method, 2022 MRS Fall Meeting & Exhibit, Nov. 2022.
• T. Shimizu, H. Funakubo, N. Ohashi. Materials Aspects of New Ferroelectrics with Simple Crystal Structure, 242nd ECS Meeting, Oct. 2022.
• Takao Shimizu, Yuki Tashiro, Takanori Mimura, Hiroshi Funakubo. Kinetic formation and field induced phase transition in ferroelectric HfO2- based materials, KJC-FE13 (The 13th Korea-Japan Conference on Ferroelectrics), Sept. 2022.
• Hiroshi Funakubo, Daichi Ichinose, Yoshitaka Ehara, Takao Shimizu, Osami Sakata, Tomoaki Yamada. Domain structure change by applying an electric field in dominantly in-plane-polarized (100)/(001)-oriented tetragonal Pb(Zr,Ti)O3 films, ISFD-15 (15th International Symposium on Ferroic Domains & Micro- to Nano-scopic Structures), Aug. 2022.
• Pratyush Buragohain, Sangita Dutta, Haidong Lu, Sebastjan Glinšek, Hugo Aramberri, Claudia Richter, Terrence Mittmann, Pamenas Kariuki, Takanori Mimura, Takao Shimizu, Hiroshi Funakubo, Uwe Schroeder, Emmanuel Defay. Observation of Negative Piezoelectricity in HfO2-Based Thin Film Capacitors, 2022 ISAF-PFM-ECAPD Joint Conference, June 2022.
• Hiranaga Y., Mimura T., Shimizu T., Funakubo H., Cho Y.. Nanoscale Domain Dynamics Characterization Using Local C-V Mapping, ISyDMA’6 (Sixth International Symposium on Dielectric Materials and Applications), Dec. 2021.
• Takao Shimizu, Yuki Tashiro, Takanori Mimura, Hiroshi Funakubo. Ferroelectricity induced by the kinetic formation in Y-HfO2 epitaxial films, MRM 2021 (Materials Research Meeting 2021), Dec. 2021.
• Hiroshi Funakubo, Shinnosuke Yasuoka, Ryoichi Mizutani, Takahisa Shiraishi, Akinori Tateyama, Takao Shimizu, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Yoshiomi Hiranaga, Yasuo Cho. Control of Ferroelectric Property in (Al1-xScx)N Films Prepared by Sputtering Method, 2021 MRS Fall Meeting & Exhibit, Nov. 2021.
• Funakubo, H., Shimura, R., Mimura, T., Tateyama, A., Nakamura, Y., Shimizu, T., Yamada, T., Tanaka, Y., Inoue, Y.. Low temperature preparation of thick Y-HfO2 ferroelectric films, E-MRS (2021 Fall Meeting of the European Materials Research Society), Sept. 2021.
• Shimizu, T., Tashiro Y., Takanori M., Shiraishi T., Kiguchi T., Konno T. J., Sakata O., Funakubo H.. Field-Induced Structural Change in HfO2-Based Ferroelectric Materials, E-MRS (2021 Fall Meeting of the European Materials Research Society), Sept. 2021.
• Hiroshi Funakubo, Yuki Tashiro, Takanori Mimura, Takao Shimizu. Phase stability of ferroelectric HfO2-based films, AWAD 2021 (2021 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices), Aug. 2021.
• Keisuke Ishihama, Takao Shimizu, Wakiko Yamaoka, Risako Tsurumaru, Shintaro Yoshimura, Yusuke Sato, Hiroshi Funakubo. Composition dependencies of crystal structure and electrical properties of epitaxial tetragonal (Bi,Na)TiO3-BaTiO3 films, STAC12 (The twelfth International conference on the Science and Technology for Advanced Ceramics), July 2021.
• Takao Shimizu, Takanori Mimura, Yuki Tashiro, Takanori Kiguchi, Takahisa Shiraishi, Toyohiko J. Konno, Osami Sakata, Hiroshi Funakubo. Field-induced structural change in HfO2-based ferroelectric materials, 2021 ISAF-ISIF-PFM Joint Conference, May 2021.
• Tomoaki Yamada, Yuto Ota, Masahito Yoshino, Daisuke Ichinose, Takao Shimizu, Hiroshi Funakubo, Takanori Nagasaki. Two-step Phase Transition Behavior in Tensile-strained (PbxSr1-x)TiO3 Thin Films below 50 nm Thickness, 2021 ISAF-ISIF-PFM Joint Conference, May 2021.
• Yoshiomi Hiranaga, Takanori Mimura, Takao Shimizu, Hiroshi Funakubo, Yasuo Cho. Local C-V Characterization for Ferroelectric Films, 2021 ISAF-ISIF-PFM Joint Conference, May 2021.
• Shinnosuke Yasuoka, Takao Shimizu, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Yoshiomi Hiranaga, Yasuo Cho, Hiroshi Funakubo. Downscaling and low temperature deposition of ferroelectric (Al1-xScx)N thin films deposited by dual sputtering, 2021 ISAF-ISIF-PFM Joint Conference, May 2021.
• Shimizu, T., Mimura, T., Tashiro, Y., Sakata, O., Funakubo, H. Phase transition in HfO2 ferroelectric materials investigated by XRD study, E-MRS (2021 Spring Meeting of the European Materials Research Society), May 2021.
• Takao Shimizu, Takanori Mimura, Yuki Tashiro, Takahisa Shiraishi, Takanori Kiguchi, Toyohiko J. Konno, Osami Sakata, Yoshio Katsuya, Hiroshi Funakubo. Structure Change in the HfO2 Ferroelectric Materials Induced by an Electric Field, ICC8 (8th International Congress on Ceramics), Apr. 2021.
• Hiroshi Funakubo, Takanori Mimura, Reijiro Shimura, Yoshiko Nakamura, Takao Shimizu. Stability and Room Temperature Deposition of Ferroelectric Phase in Y-Doped (Hf, Zr)O2 Films, 2021 Virtual MRS Spring Meeting & Exhibit, Apr. 2021.
• Takanori Mimura, Takao Shimizu, Hiroshi Funakubo. Thickness and composition dependences of epitaxial ferroelectric HfO2 based films, EMA2021 (Electronic Materials and Applications 2021), Jan. 2021.
• Hiroshi Funakubo, Takanori Mimura, Takao Shimizu. High stability of Ferroelectric phase in Y-doped HfO2 films, Electroceramics XVII, Aug. 2020.
• J. Molina, T. Mimura, Y. Nakamura, T. Shimizu, H. Funakubo, I. Fujiwara, T. Hoshii, S. Ohmi, A. Hori, H. Wakabayashi, K. Tsutsui, K. Kakushima. Interface engineering of BEOL compatible ferroelectric Y:HfO2 device for enhanced endurance, 2020 IMW (The 12th International Memory Workshop), May 2020.

国内会議発表 (査読なし・不明)

• 平永良臣, 三村和仙, 清水荘雄, 舟窪浩, 長康雄. 局所C-Vマップの画像処理に基づくナノスケール強誘電分極反転ダイナミクスの解析, 第71回応用物理学会春季学術講演会, Mar. 2024.
• 石濱圭佑, 岡本一輝, 森川友秀, 舟窪浩, 小寺正徳, 清水荘雄, 小金澤智之, 仲谷友孝, 坂田修身. 強誘電体ドメイン構造制御に向けたペロブスカイト型Sr(Zr,Ti)O3バッファ層の作製, 日本セラミックス協会 2024年年会, Mar. 2024.
• 清水荘雄, 岡本一輝, 舟窪浩, 小金澤智之, 仲谷友孝, 坂田修身. 面内分極配向BaTiO3基エピタキシャル薄膜の作製, 日本セラミックス協会 2024年年会, Mar. 2024.
• 野口雄貴, 三村和仙, 清水荘雄, 舟窪浩, 平永良臣. 局所C-Vマッピングと圧電応答顕微鏡の統合計測システムの開発, 第71回応用物理学会春季学術講演会, Mar. 2024.
• 中畑美紀, 岡本一輝, 石濱圭佑, 清水荘雄, 小金澤智之, 仲谷友孝, 坂田修身, 山田智明, 舟窪浩. (100)/(001)配向正方晶Pb(Zr,Ti)O3膜における結晶構造のその場観察, 第71回応用物理学会春季学術講演会, Mar. 2024.
• 村下太一, 岡本一輝, 高橋雄真, 窪田るりか, 伊東良晴, 藤井康裕, 是枝聡肇, 清水荘雄, 小林俊介, 加藤丈晴, 黄馨慧, 森分博紀, 幾原雄一, 舟窪浩. 水熱合成法で作製した(Bi, K)TiO3基強誘電体薄膜の熱処理効果とそれらの局所構造評価, 第43回電子材料研究討論会, Nov. 2023.
• 山田智明, Yuan Xueyou, 太田悠登, 清水荘雄, 岡本一輝, 吉野正人, 舟窪浩, 長崎正雅. 引張歪み(PbxSr1-x)TiO3極薄膜の特異なドメイン構造と相転移, 日本セラミックス協会第36回秋季シンポジウム, Sept. 2023.
• 清水荘雄, 青山航大, 倉持豪人, 召田雅実, 秋池良, 片瀬貴義, 木村好里, 舟窪浩. 二相共存 SrSi2における熱電特性, 日本セラミックス協会第36回秋季シンポジウム, Sept. 2023.
• 安岡 慎之介, 岡本 一輝, 清水 荘雄, 松井 尚子, 入澤 寿和, 恒川 孝二, 舟窪 浩. 種々の組成の(Al, Sc)N多層膜のスイッチング特性評価, 第84回応用物理学会秋季学術講演会, Sept. 2023.
• Xueyou Yuan, Yuto Ota, Daichi Ichinose, Takao Shimizu, Kazuki Okamoto, Yoshitaka Ehara, Masahito Yoshino, Takanori Nagasaki, Hiroshi Funakubo, Tomoaki Yamada. Domain architecture engineering of tensile-strained (PbxSr1-x)TiO3 thin films, 第84回応用物理学会秋季学術講演会, Sept. 2023.
• 石濱 圭佑, 岡本 一輝, 小寺 正徳, 森川 友秀, 清水 荘雄, 舟窪 浩. 強誘電体薄膜のドメイン構造制御に向けたSr(Zr,Ti)O3バッファ層の検討, 第84回応用物理学会秋季学術講演会, Sept. 2023.
• 前川 芳輝, 平井 浩司, 岡本 一輝, 清水 荘雄, 舟窪 浩. 格子整合によるY 添加HfO2強誘電体薄膜の配向制御, 第84回応用物理学会秋季学術講演会, Sept. 2023.
• Xueyou Yuan, Yuto Ota, Daichi Ichinose, Takao Shimizu, Kazuki Okamoto, Yoshitaka Ehara, Masahito Yoshino, Takanori Nagasaki, Hiroshi Funakubo, Tomoaki Yamada. Domain architecture engineering of tensile-strained (PbxSr1-x)TiO3 thin films, 第84回応用物理学会秋季学術講演会, Sept. 2023.
• 平永良臣, 野口雄貴, 三村和仙, 清水荘雄, 舟窪浩, 長康雄. 局所C-V マッピング法を用いたグレイン境界と強誘電分極反転挙動の関係に関する解析, 第40回強誘電体会議（FMA40）, May 2023.
• 平永良臣, 野口雄貴, 三村和仙, 清水荘雄, 舟窪浩, 長康雄. 局所C-Vマップの機械学習解析に基づくグレイン境界と強誘電ドメイン挙動の相関に関する統計的評価, 第70回応用物理学会春季学術講演会, Mar. 2023.
• 前川芳輝, 平井浩司, 安岡慎之介, 岡本一輝, 清水荘雄, 舟窪浩. 様々な基板上におけるY:HfO2エピタキシャル膜の合成と評価, 第70回応用物理学会春季学術講演会, Mar. 2023.
• 安岡慎之介, 大田怜佳, 岡本一輝, 清水荘雄, 舟窪浩. NbN電極上に作製したエピタキシャル(Al, Sc)N膜の電気特性評価, 第70回応用物理学会春季学術講演会, Mar. 2023.
• 前川芳輝, 平井浩司, 安岡慎之介, 岡本一輝, 清水荘雄, 舟窪浩. 種々の基板上におけるHfO2基エピタキシャル膜の合成と評価, 第61回セラミックス基礎科学討論会, Jan. 2023.
• 舟窪浩, 清水荘雄, 白石貴久, 岡本一輝. ペロブスカイト基強誘電体と比較したHfO2 やAlN 基強誘電体の特徴, 第42回電子材料研究討論会, Nov. 2022.
• 舟窪浩, 清水荘雄, 白石貴久, 岡本一輝. ペロブスカイト基強誘電体と比較したHfO2 やAlN 基強誘電体の特徴, 第42回電子材料研究討論会, Nov. 2022.
• 清水荘雄, 江原祥隆, 坂田修身, 舟窪浩. 時間分解X線回折によるPZTのドメインスイッチングにおける周期電場の影響の研究, 日本物理学会2022年秋季大会 物性, Sept. 2022.
• 平永良臣, 三村和仙, 清水荘雄, 舟窪浩, 長康雄. 局所C-Vマッピング法による強誘電体薄膜のナノスケール分極反転ダイナミクスのクラスタ解析, 第83回応用物理学会秋季学術講演会, Sept. 2022.
• 上原雅人, 水谷涼一, 安岡慎之介, 清水荘雄, 山田浩志, 秋山守人, 舟窪浩. Sc添加GaＮ薄膜の強誘電性へのSc濃度と温度の影響, 第83回応用物理学会秋季学術講演会, Sept. 2022.
• 安岡慎之介, 大田怜佳, 岡本一輝, 石濱圭佑, 清水荘雄, 角嶋邦之, 上原雅人, 山田浩志, 秋山守人, 小金澤智之, L. S. R. Kumara, Okkyun Seo, 坂田修身, 舟窪浩. メモリ応用に向けた(Al, Sc)N膜の薄膜化の検討, 第83回応用物理学会秋季学術講演会, Sept. 2022.
• 清水荘雄, 舟窪浩, 大橋直樹. 新規非ペロブスカイト型強誘電体の開発, 第39回強誘電体応用会議（FMA39）, June 2022.
• 平永良臣, 三村和仙, 清水荘雄, 舟窪浩, 長康雄. 局所C-V 曲線の非対称性に関するナノスケールマッピング, 第39回強誘電体応用会議（FMA39）, June 2022.
• 三村和仙, 清水荘雄, 坂田修身, 舟窪浩. HfO2基強誘電体の相転移における熱履歴, 日本物理学会第77回年次大会, Mar. 2022.
• 安岡慎之介, 水谷涼一, 大田怜佳, 白石貴久, 清水荘雄, 安井伸太郎, 江原祥隆, 西田謙, 上原雅人, 山田浩志, 秋山守人, 今井康彦, 坂田修身, 舟窪浩. 薄膜化による(Al,Sc)N膜の結晶異方性及び強誘電特性の向上, 第69回応用物理学会春季学術講演会, Mar. 2022.
• 安岡慎之介, 水谷涼一, 大田怜佳, 白石貴久, 清水荘雄, 上原雅人, 山田浩志, 秋山守人, 舟窪浩. 面内配向及び熱歪による(Al,Sc)N薄膜の強誘電特性の制御, 第69回応用物理学会春季学術講演会, Mar. 2022.
• 安岡慎之介, 水谷涼一, 大田怜佳, 白石貴久, 清水荘雄, 上原雅人, 山田浩志, 秋山守人, 舟窪浩. 強誘電体(Al1-xScx)N薄膜の結晶構造と電気特性の関係, 第41回電子材料研究討論会, Nov. 2021.
• FUNAKUBO Hiroshi, SHIMIZU Takao, SHIRAISHI Takahisa. Development of non-perovskite ferroelectric thin films, 日本セラミックス協会第34回秋季シンポジウム, Sept. 2021.
• 平永良臣, 三村和仙, 清水荘雄, 舟窪浩, 長康雄. 局所C-Vマッピングにおける主成分分析によるノイズ除去, 第82回応用物理学会秋季学術講演会, Sept. 2021.
• 石濱圭佑, 清水荘雄, 佐藤祐介, 山岡和希子, 鶴丸理沙子, 吉村真太郎, 舟窪浩. 正方晶(1-x)(Bi,Na)TiO3- xBaTiO3エピタキシャル膜の結晶構造及び電気的特性の組成依存性, 第82回応用物理学会秋季学術講演会, Sept. 2021.
• 清水荘雄, 田代裕貴, 三村和仙, 舟窪浩. Y-置換HfO2基材料の強誘電性の発現, 日本セラミックス協会第34回秋季シンポジウム, Sept. 2021.
• 舟窪浩, 白石貴久, 清水荘雄. 変位型強誘電体の最前線, 日本物理学会2021年秋季大会 [物性], Sept. 2021.
• 舟窪浩, 白石貴久, 清水荘雄. 圧電体および強誘電体薄膜における脱ペロブスカイト構造, 第82回応用物理学会秋季学術講演会, Sept. 2021.
• 舘山明紀, 伊東良晴, 白石貴久, 清水荘雄, 黒澤実, 折野裕一郎, 山田智明, 舟窪浩. 水熱合成法で合成した (K, Na)NbO3膜における圧電特性の周波数依存性, 第38回強誘電体会議（FMA 38）, June 2021.
• 石濱圭佑, 舘山明紀, 清水荘雄, 佐藤祐介, 山岡和希子, 鶴丸理沙子, 舟窪浩. 正方晶 (1-x)(Bi, Na)TiO3-xBaTiO3膜における圧電特性の組成依存性, 第38回強誘電体会議（FMA 38）, June 2021.
• 平永良臣, 三村和仙, 清水荘雄, 舟窪浩, 長康雄. 局所C-V曲線で観るナノスケール強誘電分極反転挙動, 第38回強誘電体会議（FMA 38）, June 2021.
• 江原祥隆, 一ノ瀬大地, 小寺正徳, 森川友秀, 白石貴久, 清水荘雄, 山田智明, 舟窪浩, 西田謙. 面内引張り歪みを持つ正方晶 Pb(Zr, Ti)O3エピタキシャル薄膜の冷却条件によるドメイン構造への影響, 第38回強誘電体会議（FMA 38）, June 2021.
• Xueyou Yuan, Yuto Ota, Masahito Yoshino, Takanori Nagasaki, Yoshitaka Ehara, Takao Shimizu, Hiroshi Funakubo, Tomoaki Yamada. Effects of composition and thickness on the domain structure in tensile-strained (PbxSr1-x)TiO3 thin films, 第38回強誘電体会議（FMA 38）, June 2021.
• 森川 友秀, 小寺 正徳, 清水 荘雄, 江原 祥隆, 舟窪 浩. 種々の格子定数を有するSr(Zr, Ti)O3バッファー層上に製膜したPbTiO3薄膜のドメイン構造に関する検討, 第68回応用物理学会春季学術講演会, Mar. 2021.
• 志村礼司郎, 三村和仙, 舘山明紀, 清水荘雄, 白石貴久, 舟窪浩. スパッタリング法によるY-HZO強誘電体厚膜の室温製膜とその電気特性および圧電特性評価, 第68回応用物理学会春季学術講演会, Mar. 2021.
• 水谷涼一, 安岡慎之介, 清水荘雄, 舟窪浩. (ScxAl1-x)N薄膜の強誘電性の温度依存性, 第68回応用物理学会春季学術講演会, Mar. 2021.
• 安岡慎之介, 清水荘雄, 舟窪浩. エピタキシャル(Al1-xScx)N膜の作製と強誘電性評価, 第68回応用物理学会春季学術講演会, Mar. 2021.
• 石濱圭佑, 舘山明紀, 清水荘雄, 佐藤祐介, 山岡和希子, 石田未来, 舟窪浩. 種々の基板上に成長した正方晶(1-x)(Bi,Na)TiO3-xBaTiO3膜の特性評価, 第68回応用物理学会春季学術講演会, Mar. 2021.
• 平永良臣, 三村和仙, 清水荘雄, 舟窪浩, 長康雄. 強誘電体膜における分極反転挙動のナノスケールマッピング, 第68回応用物理学会春季学術講演会, Mar. 2021.
• 清水荘雄, 江原祥隆, 三村和仙, 安井伸太郎, 山田智明, 今井康彦, 坂田修身, 舟窪浩. 時間分解XRD測定による周期電界下における菱面体PZTの(111)/(-111)ドメイン構造の観察, 第14回物性科学領域横断研究会（領域合同研究会）, Dec. 2020.
• 石濱圭佑, 舘山明紀, 佐藤祐介, 山岡和希子, 石田未来, 清水荘雄, 舟窪浩. 正方晶 (1-x)(Bi, Na)TiO3-xBaTiO3膜の評価, 第40回電子材料研究討論会, Nov. 2020.
• 清水荘雄, 田代裕貴, 三村和仙, 舟窪浩. HfO2基材料における強誘電相生成機構, 第40回電子材料研究討論会, Nov. 2020.
• 志村礼司郎, 三村和仙, 舘山明紀, 清水荘雄, 舟窪浩. スパッタリング法によるHfO2基強誘電体厚膜のシリコン基板上への室温製膜とその電気特性および圧電特性評価, 第81回応用物理学会秋季学術講演会, Sept. 2020.
• 安岡慎之介, 清水荘雄, 上原雅人, 山田浩志, 秋山守人, 舟窪浩. スパッタリング法で室温合成した(Al1-xScx)N膜の強誘電性評価, 第81回応用物理学会秋季学術講演会, Sept. 2020.
• 舘山明紀, 伊東良晴, 清水荘雄, 折野裕一郎, 黒澤実, 舟窪浩. 縦振動を用いた薄膜の正逆圧電応答同時評価法の提案, 第81回応用物理学会秋季学術講演会, Sept. 2020.
• 森川友秀, 小寺正徳, 江原祥隆, 清水荘雄, 舟窪浩. 歪フリーなPb(Zrx,Ti1-x)O3薄膜の作製法の検討, 第81回応用物理学会秋季学術講演会, Sept. 2020.
• 小寺正徳, 舟窪浩, 田口綾子, 森分博紀, 清水荘雄. ReO3構造酸フッ化物薄膜の誘電体応⽤可能性, 日本セラミックス協会第33回秋季シンポジウム, Sept. 2020.
• 舘山明紀, 伊東良晴, 清水荘雄, 黒澤実, 折野裕一郎, 吉村武, 舟窪浩. 水熱合成法で作製した自己分極(K,Na)NbO3 膜の正・逆圧電特性評価, 第37回強誘電体会議（FMA 37）, May 2020.
• 江原祥隆, 一ノ瀬大地, 中島崇明, 清水荘雄, 山田智明, 舟窪浩, 西田謙. 格子定数の異なる単結晶基板上に作成したPbTiO3 エピタキシャル薄膜の構造変化, 第37回強誘電体会議（FMA 37）, May 2020.
• 安岡 慎之介, 清水 荘雄, 上原雅人, 山田浩志, 秋山守人, 舟窪 浩. 二次元スパッタリング法により作製した(Al1-xScx)N 薄膜の強誘電特性, 第37回強誘電体会議（FMA 37）, May 2020.

その他の論文・著書など

• 清水 荘雄, 三村 和仙, 舟窪 浩. HfO2基材料における強誘電性の発現機構, セラミックス, Vol. 56, No. 7, pp. 455-458, July 2021.
• 舟窪 浩, 安岡 慎之介, 水谷 涼一, 清水 荘雄. ウルツ鉱構造窒化物の強誘電性, セラミックス, Vol. 56, No. 7, pp. 443-446, July 2021.
• 舟窪 浩, 安岡 慎之介, 清水 荘雄. ウルツ鉱構造窒化物の強誘電性 ―強誘電体の脱ペロブスカイト構造酸化物―, FINE CERAMICS REPORT 2021 夏号, 日本ファインセラミックス協会, Vol. 39, No. 3, pp. 92-95, July 2021.
• 江原 祥隆, 清水 荘雄, 舟窪 浩. 高速電界印加時の ドメイン構造変化を 利用した高性能 PZT 薄膜の開発, セラミックス, Vol. 56, No. 7, July 2021.

[ BibTeX 形式で保存 ]    [ 論文・著書をCSV形式で保存 ]    [ 特許をCSV形式で保存 ]